ArticleMicromachines2020
Metal-Assisted Chemical Etching and Electroless Deposition for Fabrication of Hard X-ray Pd/Si Zone Plates.
Article in Micromachines, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
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Who cites it
7 citing papers in PubMed.
- Advances in Porous Silicon Materials for Sensing, Energy Storage, and Microelectronics.Nanomaterials (Basel, Switzerland) · 2026Review
- Single Layer Lift-Off of CSAR62 for Dense Nanostructured Patterns.Micromachines · 2023Article
- NanoMAX: the hard X-ray nanoprobe beamline at the MAX IV Laboratory.Journal of synchrotron radiation · 2021Article
- Optimization of Metal-Assisted Chemical Etching for Deep Silicon Nanostructures.Nanomaterials (Basel, Switzerland) · 2021Article
- Editorial for the Special Issue on Micro- and Nano-Fabrication by Metal Assisted Chemical Etching.Micromachines · 2020Article
- Microfabrication of X-ray Optics by Metal Assisted Chemical Etching: A Review.Micromachines · 2020Review
- Micromachining of High Quality PMN-31%PT Single Crystals for High-Frequency (>20 MHz) Ultrasonic Array Transducer Applications.Micromachines · 2020Article
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Authors and funding
8 authors.
Funding
Abstract
Zone plates are diffractive optics commonly used in X-ray microscopes. Here, we present a wet-chemical approach for fabricating high aspect ratio Pd/Si zone plate optics aimed at the hard X-ray regime. A Si zone plate mold is fabricated via metal-assisted chemical etching (MACE) and further metalized with Pd via electroless deposition (ELD). MACE results in vertical Si zones with high aspect ratios. The observed MACE rate with our zone plate design is 700 nm/min. The ELD metallization yields a Pd density of 10.7 g/cm 3 , a value slightly lower than the theoretical density of 12 g/cm 3 . Fabricated zone plates have a grid design, 1:1 line-to-space-ratio, 30 nm outermost zone width, and an aspect ratio of 30:1. At 9 keV X-ray energy, the zone plate device shows a first order diffraction efficiency of 1.9%, measured at the MAX IV NanoMAX beamline. With this work, the possibility is opened to fabricate X-ray zone plates with low-cost etching and metallization methods.
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