Evidence map›Paper›PMID 31979161›Full record

ArticleSensors (Basel, Switzerland)2020

In-Plane and Out-of-Plane MEMS Piezoresistive Cantilever Sensors for Nanoparticle Mass Detection.

Andi Setiono, Maik Bertke, Wilson Ombati Nyang'au, Jiushuai Xu, Michael Fahrbach, Ina Kirsch, Erik Uhde, Alexander Deutschinger, Ernest J Fantner, Christian H Schwalb and 2 more

Abstract read
In one paragraph

Article in Sensors (Basel, Switzerland), 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 10 papers.

0numbers the graph read from it
0cells of the map it votes in
10citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

10 citing papers in PubMed.

  1. Review
  2. Article
  3. Additive Manufacturing of CoNanomaterials (Basel, Switzerland) · 2023
    Article
  4. On the nonlinear dynamics of a piezoresistive based mass switch based on catastrophic bifurcation.International journal of mechanics and materials in design · 2023
    Article
  5. Article
  6. Article
  7. Article
  8. Article
  9. Article
  10. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

12 authors.

Andi SetionoInstitute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.
Maik BertkeInstitute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.
Wilson Ombati Nyang'auInstitute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.
Jiushuai XuInstitute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.
Michael FahrbachInstitute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.
Ina KirschFraunhofer Wilhelm-Klauditz-Institut (WKI), 38108 Braunschweig, Germany.
Erik UhdeFraunhofer Wilhelm-Klauditz-Institut (WKI), 38108 Braunschweig, Germany.
Alexander DeutschingerSCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria.
Ernest J FantnerSCL-Sensor.Tech. Fabrication GmbH, 1220 Vienna, Austria.
Christian H SchwalbGETec Microscopy GmbH, 1220 Vienna, Austria.
Hutomo Suryo WasistoInstitute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.
Erwin PeinerInstitute of Semiconductor Technology (IHT) and Laboratory of Emerging Nanometrology (LENA), Technische Universität Braunschweig, 38106 Braunschweig, Germany.

Funding

European Metrology Programme for Innovation and Research 17IND05 MicroProbes
6 · The paper itself

Abstract

In this study, we investigate the performance of two piezoresistive micro-electro-mechanical system (MEMS)-based silicon cantilever sensors for measuring target analytes (i.e., ultrafine particulate matters). We use two different types of cantilevers with geometric dimensions of 1000 × 170 × 19.5 µm

Indexed as

carbon nanoparticledynamic modeMEMS piezoresistive cantilever sensorsparticle mass measurement

Identifiers

PMID31979161
PMCPMC7038349

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.