ArticleResearch (Washington, D.C.)2019
A Piezoelectric and Electromagnetic Dual Mechanism Multimodal Linear Actuator for Generating Macro- and Nanomotion.
Article in Research (Washington, D.C.), 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
7 citing papers in PubMed.
- Design and Analysis of a Two-Degree-of-Freedom Inertial Piezoelectric Platform.Materials (Basel, Switzerland) · 2025Article
- Developments and Challenges of Miniature Piezoelectric Robots: A Review.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2023Review
- A Symmetric-Actuating Linear Piezoceramic Ultrasonic Motor Capable of Producing a Scissoring Effect.Research (Washington, D.C.) · 2023Article
- Standardized Volume Power Density Boost in Frequency-Up Converted Contact-Separation Mode Triboelectric Nanogenerators.Research (Washington, D.C.) · 2023Article
- Miniaturized electromechanical devices with multi-vibration modes achieved by orderly stacked structure with piezoelectric strain units.Nature communications · 2022Article
- Tailoring Artificial Mode to Enable Cofired Integration of Shear-type Piezoelectric Devices.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2020Article
- A Novel Stick-Slip Nanopositioning Stage Integrated with a Flexure Hinge-Based Friction Force Adjusting Structure.Micromachines · 2020Article
Corrections and comments
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Authors and funding
9 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Fast actuation with nanoprecision over a large range has been a challenge in advanced intelligent manufacturing like lithography mask aligner. Traditional stacked stage method works effectively only in a local, limited range, and vibration coupling is also challenging. Here, we design a dual mechanism multimodal linear actuator (DMMLA) consisted of piezoelectric and electromagnetic costator and coslider for producing macro-, micro-, and nanomotion, respectively. A DMMLA prototype is fabricated, and each working mode is validated separately, confirming its fast motion (0~50 mm/s) in macromotion mode, micromotion (0~135
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.