ReviewMicromachines2020
Recent Progress of Miniature MEMS Pressure Sensors.
Review in Micromachines, 2020. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 49 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
49 citing papers in PubMed, 241 citations in OpenAlex.
- Experimental and clinical studies: a scoping review of intrarenal pressure in percutaneous nephrolithotomy.World journal of urology · 2026Article
- A High-Sensitivity MEMS Pressure Sensor with a Narrow Cross-Beam Membrane-Short Beam Structure.Micromachines · 2026Article
- Theoretical and Numerical Investigation of Normalized Sensitivity in MEMS Capacitive Pressure Sensors Based on Dimensionless Large-Deflection Governing Equations.Micromachines · 2026Article
- Millisecond-Delayed Fluorescence in Heavy-Halogen-Substituted TADF Emitters for Air-Pressure Sensing.ACS applied materials & interfaces · 2026Article
- Ecosystem technology (ecotech): Harnessing natural processes to address global challenges.Science advances · 2026Review
- All-sapphire-based high-temperature pressure sensor system with in situ temperature compensation: innovative cavity design, fabrication, and APSC-FFT algorithm.Microsystems & nanoengineering · 2026Article
- SOI-Structured Piezoresistive Pressure Sensor with Integration of Temperature Sensor for Downhole Applications.Sensors (Basel, Switzerland) · 2026Article
- A cost-effective laboratory device for single slow micro compression testing of soft materials in the small-strain region.HardwareX · 2026Article
- Investigation of III-Nitride MEMS Pressure Sensor for High-Temperature Applications.Micromachines · 2026Article
- A High-Accuracy Solid/Liquid Composite Packaging Method for Implantable Pressure Sensors.Micromachines · 2026Article
- A ceramic-based ITON piezoresistive pressure sensor with wide temperature range (RT-900 °C) and broad frequency response.Microsystems & nanoengineering · 2025Article
- Bifurcation-based wide-range vacuum pressure micro-sensor.Scientific reports · 2025Article
- Design of a Rapid and Accurate Calibration System for Pressure Sensors with Minimized Temperature Variation.Sensors (Basel, Switzerland) · 2025Article
- Advances in Bio-Microelectromechanical System-Based Sensors for Next-Generation Healthcare Applications.ACS omega · 2025Review
- Enhancement of Roll-to-Roll Gravure-Printed Cantilever Touch Sensors via a Transferring and Bonding Method.Sensors (Basel, Switzerland) · 2025Article
- MEMS Pressure Sensors with Novel TSV Design for Extreme Temperature Environments.Sensors (Basel, Switzerland) · 2025Article
- Novel MEMS Multisensor Chip for Aerodynamic Pressure Measurements.Sensors (Basel, Switzerland) · 2025Article
- An Investigation into High-Accuracy and Energy-Efficient Novel Capacitive MEMS for Tire Pressure Sensor Application.Sensors (Basel, Switzerland) · 2024Article
- MEMS and ECM Sensor Technologies for Cardiorespiratory Sound Monitoring-A Comprehensive Review.Sensors (Basel, Switzerland) · 2024Review
- Low-Cost and Paper-Based Micro-Electromechanical Systems Sensor for the Vibration Monitoring of Shield Cutters.Sensors (Basel, Switzerland) · 2024Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
9 authors at 1 institution in 1 country.
Funding
Abstract
Miniature Microelectromechanical Systems (MEMS) pressure sensors possess various merits, such as low power consumption, being lightweight, having a small volume, accurate measurement in a space-limited region, low cost, little influence on the objects being detected. Accurate blood pressure has been frequently required for medical diagnosis. Miniature pressure sensors could directly measure the blood pressure and fluctuation in blood vessels with an inner diameter from 200 to 1000 m. Glaucoma is a group of eye diseases usually resulting from abnormal intraocular pressure. The implantable pressure sensor for real-time inspection would keep the disease from worsening; meanwhile, these small devices could alleviate the discomfort of patients. In addition to medical applications, miniature pressure sensors have also been used in the aerospace, industrial, and consumer electronics fields. To clearly illustrate the "miniature size", this paper focuses on miniature pressure sensors with an overall size of less than 2 mm × 2 mm or a pressure sensitive diaphragm area of less than 1 mm × 1 mm. In this paper, firstly, the working principles of several types of pressure sensors are briefly introduced. Secondly, the miniaturization with the development of the semiconductor processing technology is discussed. Thirdly, the sizes, performances, manufacturing processes, structures, and materials of small pressure sensors used in the different fields are explained in detail, especially in the medical field. Fourthly, problems encountered in the miniaturization of miniature pressure sensors are analyzed and possible solutions proposed. Finally, the probable development directions of miniature pressure sensors in the future are discussed.
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.