ArticleOptics express2019
Visible-light silicon nitride waveguide devices and implantable neurophotonic probes on thinned 200 mm silicon wafers.
Article in Optics express, 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 26 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
26 citing papers in PubMed, 129 citations in OpenAlex.
- Integrated blue ZnSe/ZnS quantum dot lasers on a silicon nitride platform.Nature nanotechnology · 2026Article
- Hybrid Integration of InGaN Lasers in a Foundry-Fabricated Visible-Light Photonics Platform.Nanophotonics (Berlin, Germany) · 2026Article
- Nanophotonic neural probes for in vivo photostimulation, electrophysiology, and microfluidic delivery.Microsystems & nanoengineering · 2026Article
- Focusing optical phased array for tissue interrogation with improved side-lobe suppression and simplified beam steering.Biomedical optics express · 2026Article
- High-Efficiency Fiber Edge Coupling for Silicon Nitride Integrated Photonics.Micromachines · 2025Article
- Article
- Foundry-fabricated dual-color nanophotonic neural probes for photostimulation and electrophysiological recording.Neurophotonics · 2025Article
- A Single Sub-Millimetric Metasurface-Based Optical Element for Lattice Bessel Beam Excitation Enabling Brain Activity Recordings In Vivo.Small (Weinheim an der Bergstrasse, Germany) · 2025Article
- Implantable silicon neural probes with nanophotonic phased arrays for single-lobe beam steering.Communications engineering · 2024Article
- A thin film lithium niobate near-infrared platform for multiplexing quantum nodes.Nature communications · 2024Article
- Stress-Dependent Optical Extinction in Low-Pressure Chemical Vapor Deposition Silicon Nitride Measured by Nanomechanical Photothermal Sensing.Nano letters · 2024Article
- Photonic neural probe enabled microendoscopes for light-sheet light-field computational fluorescence brain imaging.Neurophotonics · 2024Article
- Article
- Implantable photonic neural probes with out-of-plane focusing grating emitters.Scientific reports · 2024Article
- Biohybrid Photonic Platform for Subcellular Stimulation and Readout of In Vitro Neurons.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Article
- High-confinement alumina waveguides with sub-dB/cm propagation losses at 450 nm.Scientific reports · 2023Article
- Microcantilever-integrated photonic circuits for broadband laser beam scanning.Nature communications · 2023Article
- Sub-1 Volt and high-bandwidth visible to near-infrared electro-optic modulators.Nature communications · 2023Article
- Implantable photonic neural probes with 3D-printed microfluidics and applications to uncaging.Frontiers in neuroscience · 2023Article
- Design of a novel hybrid multimode interferometer operating with both TE and TM polarizations for sensing applications.Optical and quantum electronics · 2023Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
12 authors at 4 institutions in 3 countries.
Funding
No grant is acknowledged in the PubMed record.
Abstract
We present passive, visible light silicon nitride waveguides fabricated on ≈ 100 µm thick 200 mm silicon wafers using deep ultraviolet lithography. The best-case propagation losses of single-mode waveguides were ≤ 2.8 dB/cm and ≤ 1.9 dB/cm over continuous wavelength ranges of 466-550 nm and 552-648 nm, respectively. In-plane waveguide crossings and multimode interference power splitters are also demonstrated. Using this platform, we realize a proof-of-concept implantable neurophotonic probe for optogenetic stimulation of rodent brains. The probe has grating coupler emitters defined on a 4 mm long, 92 µm thick shank and operates over a wide wavelength range of 430-645 nm covering the excitation spectra of multiple opsins and fluorophores used for brain stimulation and imaging.
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.