ReviewMicromachines2019
Development Trends and Perspectives of Future Sensors and MEMS/NEMS.
Review in Micromachines, 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 88 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
88 citing papers in PubMed.
- From Sensor-Empowered Ubiquitous Computing to Embodied Intelligence: Architectures, Paradigm Evolution, and Emerging Challenges.Sensors (Basel, Switzerland) · 2026Review
- Atomic Layer Deposition Processes: Versatile Platforms for Engineering ZnO-Chitosan Biointerfaces.Advanced healthcare materials · 2026Article
- Air-Coupled Ultrasound Systems for Biomedical Applications: Advances in Sensors, Electronic Interfaces and Signal Processing Strategies.Sensors (Basel, Switzerland) · 2026Review
- Precision Farming with Smart Sensors: Current State, Challenges and Future Outlook.Sensors (Basel, Switzerland) · 2026Review
- In situ UV-laser-induced forward transfer of carbon nanosphere/graphene composites on siloxane-polyurethane substrates for human health monitoring.Advanced composites and hybrid materials · 2026Article
- Identification of Mechanical Parameters of the Silicon Structure of a Capacitive MEMS Accelerometer.Materials (Basel, Switzerland) · 2025Article
- Insect-inspired micro-optical antenna enables ultrasensitive multisensory perception.Science advances · 2025Article
- Advances of Welding Technology of Glass for Electrical Applications.Materials (Basel, Switzerland) · 2025Review
- Enhancing drainage pipeline inspection: advanced integration of six-axis sensor fusion and extended Kalman filter.Water science and technology : a journal of the International Association on Water Pollution Research · 2025Article
- Advances in Bio-Microelectromechanical System-Based Sensors for Next-Generation Healthcare Applications.ACS omega · 2025Review
- A Full-Range Proximity-Tactile Sensor Based on Multimodal Perception Fusion for Minimally Invasive Surgical Robots.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Design and Electromagnetic Performance Optimization of a MEMS Miniature Outer-Rotor Permanent Magnet Motor.Micromachines · 2025Article
- Review of Self-Powered Wireless Sensors by Triboelectric Breakdown Discharge.Micromachines · 2025Review
- Prospects and Trends in Biomedical Microelectromechanical Systems (MEMS) Devices: A Review.Biomolecules · 2025Review
- Process Development Methods in Microtechnology and the Associated Process Environment.Micromachines · 2025Article
- Research on Flexible Sensors for Wearable Devices: A Review.Nanomaterials (Basel, Switzerland) · 2025Review
- The Effect of Honeycomb-Structured Hydrophilic-Hydrophobic Mixed Surfaces on the Spreading Process of Liquid Droplets.Biomimetics (Basel, Switzerland) · 2025Article
- Parametric Aerodynamic Study of Galloping Piezoelectric Energy Harvester with Arcuate Protruding and Depressed Features.Sensors (Basel, Switzerland) · 2025Article
- Effects of Aerodynamic Parameters on Performance of Galloping Piezoelectric Energy Harvester Based on Cross-Sectional Shape Evolutionary Approach.Micromachines · 2025Article
- Triboelectric Mat Multimodal Sensing System (TMMSS) Enhanced by Infrared Image Perception for Sleep and Emotion-Relevant Activity Monitoring.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
28 more citing papers are in PubMed but not listed here.
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
10 authors.
Funding
Abstract
With the fast development of the fifth-generation cellular network technology (5G), the future sensors and microelectromechanical systems (MEMS)/nanoelectromechanical systems (NEMS) are presenting a more and more critical role to provide information in our daily life. This review paper introduces the development trends and perspectives of the future sensors and MEMS/NEMS. Starting from the issues of the MEMS fabrication, we introduced typical MEMS sensors for their applications in the Internet of Things (IoTs), such as MEMS physical sensor, MEMS acoustic sensor, and MEMS gas sensor. Toward the trends in intelligence and less power consumption, MEMS components including MEMS/NEMS switch, piezoelectric micromachined ultrasonic transducer (PMUT), and MEMS energy harvesting were investigated to assist the future sensors, such as event-based or almost zero-power. Furthermore, MEMS rigid substrate toward NEMS flexible-based for flexibility and interface was discussed as another important development trend for next-generation wearable or multi-functional sensors. Around the issues about the big data and human-machine realization for human beings' manipulation, artificial intelligence (AI) and virtual reality (VR) technologies were finally realized using sensor nodes and its wave identification as future trends for various scenarios.
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What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.