ArticleMicrosystems & nanoengineering2019
Scalable integration of nano-, and microfluidics with hybrid two-photon lithography.
Article in Microsystems & nanoengineering, 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 21 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
21 citing papers in PubMed.
- Lighting the Path to Precision Healthcare: Advances and Applications of Wearable Photonic Sensors.Advanced materials (Deerfield Beach, Fla.) · 2025Review
- Micro/nano-robotic medical device: preparation, actuation mechanisms and their applications in medicine.RSC advances · 2025Review
- Augmented 3D Printing for Multiscale Microphysiological Systems.Small (Weinheim an der Bergstrasse, Germany) · 2025Review
- High- and Low-Fluorescent Photoinitiators for Multiphoton Lithography.ACS applied polymer materials · 2025Article
- Engineering multifunctional surface topography to regulate multiple biological responses.Biomaterials · 2025Review
- A Versatile Platform for Designing and Fabricating Multi-Material Perfusable 3D Microvasculatures.Micromachines · 2025Article
- Multiphoton and Harmonic Imaging of Microarchitected Materials.ACS applied materials & interfaces · 2025Article
- Site-Selective Biofunctionalization of 3D Microstructures Via Direct Ink Writing.Small (Weinheim an der Bergstrasse, Germany) · 2024Article
- Article
- Spatial modulation of scalable nanostructures by combining maskless plasmonic lithography and grayscale-patterned strategy.Nanoscale advances · 2023Article
- Ultrahigh-Throughput Enzyme Engineering and Discovery inChemical reviews · 2023Review
- Two decades of two-photon lithography: Materials science perspective for additive manufacturing of 2D/3D nano-microstructures.iScience · 2023Review
- Single-Molecule Sizing through Nanocavity Confinement.Nano letters · 2023Article
- Article
- Spatially and optically tailored 3D printing for highly miniaturized and integrated microfluidics.Nature communications · 2021Article
- Fiber-tip polymer clamped-beam probe for high-sensitivity nanoforce measurements.Light, science & applications · 2021Article
- Breaking the Third Wall: Implementing 3D-Printing Technics to Expand the Complexity and Abilities of Multi-Organ-on-a-Chip Devices.Micromachines · 2021Article
- The Use of Microfabrication Techniques for the Design and Manufacture of Artificial Stem Cell Microenvironments for Tissue Regeneration.Bioengineering (Basel, Switzerland) · 2021Review
- Fabrication of Functional Microdevices in SU-8 by Multi-Photon Lithography.Micromachines · 2021Review
- Tuning Surface Morphology of Fluorescent Hydrogels Using a Vortex Fluidic Device.Molecules (Basel, Switzerland) · 2020Review
Corrections and comments
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Authors and funding
7 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Nanofluidic devices have great potential for applications in areas ranging from renewable energy to human health. A crucial requirement for the successful operation of nanofluidic devices is the ability to interface them in a scalable manner with the outside world. Here, we demonstrate a hybrid two photon nanolithography approach interfaced with conventional mask whole-wafer UV-photolithography to generate master wafers for the fabrication of integrated micro and nanofluidic devices. Using this approach we demonstrate the fabrication of molds from SU-8 photoresist with nanofluidic features down to 230 nm lateral width and channel heights from micron to sub-100 nm. Scanning electron microscopy and atomic force microscopy were used to characterize the printing capabilities of the system and show the integration of nanofluidic channels into an existing microfluidic chip design. The functionality of the devices was demonstrated through super-resolution microscopy, allowing the observation of features below the diffraction limit of light produced using our approach. Single molecule localization of diffusing dye molecules verified the successful imprint of nanochannels and the spatial confinement of molecules to 200 nm across the nanochannel molded from the master wafer. This approach integrates readily with current microfluidic fabrication methods and allows the combination of microfluidic devices with locally two-photon-written nano-sized functionalities, enabling rapid nanofluidic device fabrication and enhancement of existing microfluidic device architectures with nanofluidic features.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.