ArticleMicromachines2019
Effects of Imprinting Pressure on the Damage of Flexible Composite Mould and Pattern Quality during UV Nanoimprinting.
Article in Micromachines, 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Authors and funding
3 authors.
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Abstract
Imprinting pressure is the significant factor for composite mould durability and pattern quality during UV nanoimprinting on complex surfaces. To solve these problems, the effects of imprinting pressure on the damage of flexible composite mould and pattern quality-encountering particles were investigated through experiment and simulation. It was found that increasing the pressure could improve the pattern quality, but it will damage the mould and reduce the durability. Moreover, too small pressure could lead to serious pattern defects. Therefore, the imprint pressure of 30 kPa was suitable for use in the imprinting process from the viewpoints of protecting the mould and reducing pattern defects. These findings will be useful for improving the pattern quality and mould durability.
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Registered trials
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