ArticleMicromachines2019
Stability Study of an Electrothermally-Actuated MEMS Mirror with Al/SiO
Article in Micromachines, 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
2 citing papers in PubMed.
- Design, Simulation, Fabrication, and Characterization of an Electrothermal Tip-Tilt-Piston Large Angle Micromirror for High Fill Factor Segmented Optical Arrays.Micromachines · 2021Article
- Design and Fabrication of a Kirigami-Inspired Electrothermal MEMS Scanner with Large Displacement.Micromachines · 2020Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
6 authors.
Funding
Abstract
Electrothermal actuation is one of the main actuation mechanisms and has been employed to make scanning microelectromechanical systems (MEMS) mirrors with large scan range, high fill factor, and low driving voltage, but there exist long-term drifting issues in electrothermal bimorph actuators whose causes are not well understood. In this paper, the stability of an Al / SiO 2 bimorph electrothermal MEMS mirror operated in both static and dynamic scan mode has been studied. Particularly, the angular drifts of the MEMS mirror plate were measured over 90 h at different temperatures in the range of 50 - 150 °C. The experiments show that the temporal drift of the mirror plate orientation largely depends on the temperature of the electrothermal bimorph actuators. Interestingly, it is found that the angular drift changes from falling to rising as the temperature increases. An optimal operating temperature between 75 °C to 100 °C for the MEMS mirror is identified. At this temperature, the MEMS mirror exhibited stable scanning with an angular drift of less than 0.0001 °/h.
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Registered trials
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