ArticleSensors (Basel, Switzerland)2019
Improved Optical Waveguide Microcantilever for Integrated Nanomechanical Sensor.
Article in Sensors (Basel, Switzerland), 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.
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9 authors.
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Abstract
This paper reports on an improved optical waveguide microcantilever sensor with high sensitivity. To improve the sensitivity, a buffer was introduced into the connection of the input waveguide and optical waveguide cantilever by extending the input waveguide to reduce the coupling loss of the junction. The buffer-associated optical losses were examined for different cantilever thicknesses. The optimum length of the buffer was found to be 0.97 μm for a cantilever thickness of 300 nm. With this configuration, the optical loss was reduced to about 40%, and the maximum sensitivity was more than twice that of the conventional structure.
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