ArticleFrontiers in neuroscience2019
High Density, Double-Sided, Flexible Optoelectronic Neural Probes With Embedded μLEDs.
Article in Frontiers in neuroscience, 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 24 papers.
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Who cites it
24 citing papers in PubMed.
- Conformal bumped electrode web for chronic ECoG recordings in swine.Microsystems & nanoengineering · 2026Article
- Robust minimally-invasive microfabricated stainless steel neural interfaces for high resolution recording.Nature communications · 2026Article
- Innovating beyond electrophysiology through multimodal neural interfaces.Nature reviews electrical engineering · 2025Article
- Flexible neural probes: a review of the current advantages, drawbacks, and future demands.Journal of Zhejiang University. Science. B · 2024Review
- Flexible electronic-photonic 3D integration from ultrathin polymer chiplets.Npj flexible electronics · 2024Article
- Fully flexible implantable neural probes for electrophysiology recording and controlled neurochemical modulation.Microsystems & nanoengineering · 2024Article
- Emerging trends in the development of flexible optrode arrays for electrophysiology.APL bioengineering · 2023Review
- Proof of Concept for Sustainable Manufacturing of Neural Electrode Array for In Vivo Recording.Biosensors · 2023Article
- Review
- A Review: Research Progress of Neural Probes for Brain Research and Brain-Computer Interface.Biosensors · 2022Review
- In Vivo Penetrating Microelectrodes for Brain Electrophysiology.Sensors (Basel, Switzerland) · 2022Review
- HectoSTAR μLED Optoelectrodes for Large-Scale, High-Precision In Vivo Opto-Electrophysiology.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2022Article
- Flexible Electronics and Devices as Human-Machine Interfaces for Medical Robotics.Advanced materials (Deerfield Beach, Fla.) · 2022Review
- Flexible optoelectric neural interfaces.Current opinion in biotechnology · 2021Review
- Assessment of optogenetically-driven strategies for prosthetic restoration of cortical vision in large-scale neural simulation of V1.Scientific reports · 2021Article
- POEMS (POLYMERIC OPTO-ELECTRO-MECHANICAL SYSTEMS) FOR ADVANCED NEURAL INTERFACES.Materials letters · 2021Article
- Fabrication of a Multilayer Implantable Cortical Microelectrode Probe to Improve Recording Potential.Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems · 2021Article
- Wafer-scale transfer route for top-down III-nitride nanowire LED arrays based on the femtosecond laser lift-off technique.Microsystems & nanoengineering · 2021Article
- Technological Challenges in the Development of Optogenetic Closed-Loop Therapy Approaches in Epilepsy and Related Network Disorders of the Brain.Micromachines · 2020Review
- Recent Advances in Electrical Neural Interface Engineering: Minimal Invasiveness, Longevity, and Scalability.Neuron · 2020Review
Corrections and comments
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Authors and funding
7 authors.
Funding
Abstract
Optical stimulation and imaging of neurons deep in the brain require implantable optical neural probes. External optical access to deeper regions of the brain is limited by scattering and absorption of light as it propagates through tissue. Implantable optoelectronic probes capable of high-resolution light delivery and high-density neural recording are needed for closed-loop manipulation of neural circuits. Micro-light-emitting diodes (μLEDs) have been used for optical stimulation, but predominantly on rigid silicon or sapphire substrates. Flexible polymer neural probes would be preferable for chronic applications since they cause less damage to brain tissue. Flexible μLED neural probes have been recently implemented by flip-chip bonding of commercially available μLED chips onto flexible substrates. Here, we demonstrate a monolithic design for flexible optoelectronic neural interfaces with embedded gallium nitride μLEDs that can be microfabricated at wafer-scale. Parylene C is used as the substrate and insulator due to its biocompatibility, compliance, and optical transparency. We demonstrate one-dimensional and two-dimensional individually-addressable μLED arrays. Our μLEDs have sizes as small as 22 × 22 μm in arrays of up to 32 μLEDs per probe shank. These devices emit blue light at a wavelength of 445 nm, suitable for stimulation of channelrhodopsin-2, with output powers greater than 200 μW at 2 mA. Our flexible optoelectronic probes are double-sided and can illuminate brain tissue from both sides. Recording electrodes are co-fabricated with μLEDs on the front- and backside of the optoelectronic probes for electrophysiology recording of neuronal activity from the volumes of tissue on the front- and backside simultaneously with bi-directional optical stimulation.
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