ArticleJournal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems2018
MEMS 3D Scan Mirror with SU-8 Membrane and Flexures for High NA Microscopy.
Article in Journal of microelectromechanical systems : a joint IEEE and ASME publication on microstructures, microactuators, microsensors, and microsystems, 2018. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 5 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
5 citing papers in PubMed, 9 citations in OpenAlex.
- High speed biaxial piezoelectric MEMS micromirror with varifocal tunability.Microsystems & nanoengineering · 2026Article
- MEMS Varifocal Optical Elements for Focus Control.Micromachines · 2025Review
- Varifocal MEMS mirrors for high-speed axial focus scanning: a review.Microsystems & nanoengineering · 2023Review
- MEMS-in-the-lens 3D beam scanner forProceedings of SPIE--the International Society for Optical Engineering · 2019Article
- MEMS-in-the-lens architecture for a miniature high-NA laser scanning microscope.Light, science & applications · 2019Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
4 authors at 1 institution in 1 country.
Funding
Abstract
We demonstrate a MEMS beam scanner capable of biaxial scanning with simultaneous focus control, for integration into a handheld confocal microscope for skin imaging. The device is based on a dual axis gimbal structure with an integrated largestroke deformable mirror. SU-8 polymer is used to construct both the deformable membrane as well as the torsional hinges for biaxial scanning. The 4 mm diameter mirror can perform raster pattern scanning with a range of +/- 1.5 degrees and Lissajous scanning with a range of +/- 3 degrees (mechanical scan angle), and has a maximum deflection of 9 um for focus control. The design, fabrication and characterization of the opto-mechanical performance of the MEMS device are presented in this paper.
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Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.