ArticleScientific reports2019
Robust Microfabrication of Highly Parallelized Three-Dimensional Microfluidics on Silicon.
Article in Scientific reports, 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 15 papers.
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Who cites it
15 citing papers in PubMed, 43 citations in OpenAlex.
- Controlled encapsulation and droplet size prediction in two-step microfluidic double emulsions.Lab on a chip · 2026Article
- Towards the clinical translation of a silver sulfide nanoparticle contrast agent: large scale production with a highly parallelized microfluidic chip.European journal of nuclear medicine and molecular imaging · 2025Article
- Production of Hydrophobic Microparticles at Safe-To-Inject Sizes for Intravascular Administration.Pharmaceutics · 2025Article
- Simultaneous high-throughput particle-bacteria separation and solution exchange via in-plane and out-of-plane parallelization of microfluidic centrifuges.Biomicrofluidics · 2024Article
- Engineering Synthetic Erythrocytes as Next-Generation Blood Substitutes.Advanced functional materials · 2024Article
- Complex Emulsions as an Innovative Pharmaceutical Dosage form in Addressing the Issues of Multi-Drug Therapy and Polypharmacy Challenges.Pharmaceutics · 2024Review
- Throughput-scalable manufacturing of SARS-CoV-2 mRNA lipid nanoparticle vaccines.Proceedings of the National Academy of Sciences of the United States of America · 2023Article
- A novel hardmask-to-substrate pattern transfer method for creating 3D, multi-level, hierarchical, high aspect-ratio structures for applications in microfluidics and cooling technologies.Scientific reports · 2022Article
- Droplet-assisted electrospray phase separation using an integrated silicon microfluidic platform.Lab on a chip · 2021Article
- Scaling up the throughput of microfluidic droplet-based materials synthesis: A review of recent progress and outlook.Applied physics reviews · 2021Review
- Recent Advances in Reactive Ion Etching and Applications of High-Aspect-Ratio Microfabrication.Micromachines · 2021Review
- Scalable mRNA and siRNA Lipid Nanoparticle Production Using a Parallelized Microfluidic Device.Nano letters · 2021Article
- State of the art in nonthermal plasma processing for biomedical applications: Can it help fight viral pandemics like COVID-19?Plasma processes and polymers (Print) · 2021Review
- Microfluidic formulation of nanoparticles for biomedical applications.Biomaterials · 2021Review
- A Flexible, Microfluidic, Dispensing System for Screening Drug Combinations.Micromachines · 2020Article
Corrections and comments
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Authors and funding
3 authors at 1 institution in 1 country.
Funding
No grant is acknowledged in the PubMed record.
Abstract
We present a new, robust three dimensional microfabrication method for highly parallel microfluidics, to improve the throughput of on-chip material synthesis by allowing parallel and simultaneous operation of many replicate devices on a single chip. Recently, parallelized microfluidic chips fabricated in Silicon and glass have been developed to increase the throughput of microfluidic materials synthesis to an industrially relevant scale. These parallelized microfluidic chips require large arrays (>10,000) of Through Silicon Vias (TSVs) to deliver fluid from delivery channels to the parallelized devices. Ideally, these TSVs should have a small footprint to allow a high density of features to be packed into a single chip, have channels on both sides of the wafer, and at the same time minimize debris generation and wafer warping to enable permanent bonding of the device to glass. Because of these requirements and challenges, previous approaches cannot be easily applied to produce three dimensional microfluidic chips with a large array of TSVs. To address these issues, in this paper we report a fabrication strategy for the robust fabrication of three-dimensional Silicon microfluidic chips consisting of a dense array of TSVs, designed specifically for highly parallelized microfluidics. In particular, we have developed a two-layer TSV design that allows small diameter vias (d < 20 µm) without sacrificing the mechanical stability of the chip and a patterned SiO
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.