ReviewMicromachines2019
A Review: Preparation, Performance, and Applications of Silicon Oxynitride Film.
Review in Micromachines, 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 14 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
14 citing papers in PubMed.
- Influence of the Si-Layer Thickness on the Structural, Compositional and Resistive Switching Properties of SiOMaterials (Basel, Switzerland) · 2025Article
- Advancements in Micro/Nanorobots in Medicine: Design, Actuation, and Transformative Application.ACS omega · 2025Review
- Structural, Mechanical, and Optical Properties of Laminate-Type Thin Film SWCNT/SiONanomaterials (Basel, Switzerland) · 2024Article
- Effect of NHeliyon · 2024Article
- Recent progress in quantum photonic chips for quantum communication and internet.Light, science & applications · 2023Review
- Optical Characterization of ALD-Coated Nanoporous Alumina Structures: Effect of Sample Geometry or Coated Layer Material.Micromachines · 2023Article
- Review on High-Throughput Micro-Combinatorial Characterization of Binary and Ternary Layers towards Databases.Materials (Basel, Switzerland) · 2023Review
- Investigation of the RF Sputtering Process and the Properties of Deposited Silicon Oxynitride Layers under Varying Reactive Gas Conditions.Materials (Basel, Switzerland) · 2022Article
- Fabrication and Electrical Characterization of High Aspect Ratio Through-Silicon Vias with Polyimide Liner for 3D Integration.Micromachines · 2022Article
- Optical Thin Films Fabrication Techniques-Towards a Low-Cost Solution for the Integrated Photonic Platform: A Review of the Current Status.Materials (Basel, Switzerland) · 2022Review
- Vacuum and Low-Temperature Characteristics of Silicon Oxynitride-Based Bipolar RRAM.Micromachines · 2022Article
- Subtractive Low-Temperature Preparation Route for Porous SiONanomaterials (Basel, Switzerland) · 2021Article
- Article
- Editorial for the Special Issue on Silicon Photonics Bloom.Micromachines · 2020Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
6 authors.
Funding
Abstract
Silicon oxynitride (SiN
Indexed as
Identifiers
What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.