ArticleSensors (Basel, Switzerland)2019
Chromatic Confocal Displacement Sensor with Optimized Dispersion Probe and Modified Centroid Peak Extraction Algorithm.
Article in Sensors (Basel, Switzerland), 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 12 papers.
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Who cites it
12 citing papers in PubMed.
- Optical Design of a Large-Angle Spectral Confocal Sensor for Liquid Surface Tension Measurement.Sensors (Basel, Switzerland) · 2026Article
- A Comprehensive Review of Optical Metrology and Perception Technologies.Sensors (Basel, Switzerland) · 2025Review
- A Review on Recent Advances in Signal Processing in Interferometry.Sensors (Basel, Switzerland) · 2025Review
- High-Density Arrayed Spectrometer with Microlens Array Grating for Multi-Channel Parallel Spectral Analysis.Sensors (Basel, Switzerland) · 2025Article
- A Kernel-Based Calibration Algorithm for Chromatic Confocal Line Sensors.Sensors (Basel, Switzerland) · 2024Article
- A Review: Laser Interference Lithography for Diffraction Gratings and Their Applications in Encoders and Spectrometers.Sensors (Basel, Switzerland) · 2024Review
- High-Precision Chromatic Confocal Technologies: A Review.Micromachines · 2024Review
- Compact Chromatic Confocal Lens with Large Measurement Range.Sensors (Basel, Switzerland) · 2024Article
- Comparison Analysis of Roundness Measurement of Small Cylindrical Workpieces with Different Styluses.Sensors (Basel, Switzerland) · 2024Article
- Precise Two-Dimensional Tilt Measurement Sensor with Double-Cylindrical Mirror Structure and Modified Mean-Shift Algorithm for a Confocal Microscopy System.Sensors (Basel, Switzerland) · 2022Article
- Embedded nanometer position tracking based on enhanced phasor analysis.Optics letters · 2021Article
- Swept-Source-Based Chromatic Confocal Microscopy.Sensors (Basel, Switzerland) · 2020Article
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Authors and funding
5 authors.
Funding
Abstract
Chromatic confocal technology (CCT) is one of the most promising methods for the contactless and accurate measurement of structure profiles. Based on the principles of chromatic dispersion and confocal theory, a dispersion probe is proposed and optimized with several commercial and cheap refractive index lenses. The probe provides 0.3× magnification and a dispersion range of 400 μm with a commercial LED source with an effective bandwidth of ca. 450-623 nm. Since the noise fluctuation can affect the extraction stability of the focal wavelength, a modification to the centroid peak extraction algorithm is proposed in this paper, where several virtual pixels are interpolated among the real pixels of the spectrometer before thresholding. In addition, a series of experiments were carried out to test the system's displacement measurement performance. The results clearly show that stability is improved by the modified algorithm, and the calibration repeatability is ±0.3 μm in the full measurement range with a linear stage. The standard deviation at the fixed position has an optimal value of 0.009 μm. The section profile of a Fresnel lens is measured by the CCT system to demonstrate its high feasibility and efficiency.
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Registered trials
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