ArticleSensors (Basel, Switzerland)2019
Single-Mode Tapered Vertical SU-8 Waveguide Fabricated by E-Beam Lithography for Analyte Sensing.
Article in Sensors (Basel, Switzerland), 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
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Who cites it
7 citing papers in PubMed.
- Photonics on a Budget: Low-Cost Polymer Sensors for a Smarter World.Micromachines · 2025Review
- Increasing Optical Path Lengths in Micro-Fluidic Devices Using a Multi-Pass Cell.Micromachines · 2024Article
- Optofluidic chip with directly printed polymer optical waveguide Mach-Zehnder interferometer sensors for label-free biodetection.Biomedical optics express · 2024Article
- Detailed Study of the Correlation between Cross-Linking of Thick SU-8 and UV-NIR Optical Transmission/Photoluminescence Spectroscopy.Polymers · 2023Article
- Identification of dyes and matrices for dye doped polymer waveguide emitters covering the visible spectrum.Scientific reports · 2022Article
- The Future of Neuroscience: Flexible and Wireless Implantable Neural Electronics.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2021Review
- 5-Channel Polymer/Silica Hybrid Arrayed Waveguide Grating.Polymers · 2020Article
Corrections and comments
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Authors and funding
4 authors.
Funding
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Abstract
In this paper, we propose a novel vertical SU-8 waveguide for evanescent analyte sensing. The waveguide is designed to possess a vertical and narrow structure to generate evanescent waves on both sides of the waveguide's surface, aimed at increasing the sensitivity by enlarging the sensing areas. We performed simulations to monitor the influence of different parameters on the waveguide's performance, including its height and width. E-beam lithography was used to fabricate the structure, as this one-step direct writing process enables easy, fast, and high-resolution fabrication. Furthermore, it reduces the sidewall roughness and decreases the induced scattering loss, which is a major source of waveguide loss. Couplers were added to improve the coupling efficiency and alignment tolerance, and will contribute to the feasibility of a plug-and-play optical system. Optical measurements show that the transmission loss is 1.03 ± 0.19 dB/cm. The absorption sensitivity was measured to be 4.8 dB per refractive index unit (dB/RIU) for saline solutions with various concentrations.
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