Evidence map›Paper›PMID 31195703›Full record

ArticleMicromachines2019

Design and Validation of a Single-SOI-Wafer 4-DOF Crawling Microgripper.

Matteo Verotti, Alvise Bagolini, Pierluigi Bellutti, Nicola Pio Belfiore

Abstract read
In one paragraph

Article in Micromachines, 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.

0numbers the graph read from it
0cells of the map it votes in
4citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

4 citing papers in PubMed.

  1. Article
  2. Article
  3. Article
  4. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

4 authors.

Matteo VerottiDepartment of Mechanical, Energy, Management and Transportation Engineering, University of Genoa, 16145 Genoa, Italy. matteo.verotti@unige.it.ORCID 0000-0002-1670-928X
Alvise BagoliniMicro Nano Facility, Fondazione Bruno Kessler, 38123 Trento, Italy. bagolini@fbk.eu.
Pierluigi BelluttiMicro Nano Facility, Fondazione Bruno Kessler, 38123 Trento, Italy. bellutti@fbk.eu.
Nicola Pio BelfioreDepartment of Engineering, Roma Tre University, 00146 Rome, Italy. nicolapio.belfiore@uniroma3.it.ORCID 0000-0001-5390-2831

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

This paper deals with the manipulation of micro-objects operated by a new concept multi-hinge multi-DoF (degree of freedom) microsystem. The system is composed of a planar 3-DoF microstage and of a set of one-DoF microgrippers, and it is arranged is such a way as to allow any microgripper to crawl over the stage. As a result, the optimal configuration to grasp the micro-object can be reached. Classical algorithms of kinematic analysis have been used to study the rigid-body model of the mobile platform. Then, the rigid-body replacement method has been implemented to design the corresponding compliant mechanism, whose geometry can be transferred onto the etch mask. Deep-reactive ion etching (DRIE) is suggested to fabricate the whole system. The main contributions of this investigation consist of (i) the achievement of a relative motion between the supporting platform and the microgrippers, and of (ii) the design of a process flow for the simultaneous fabrication of the stage and the microgrippers, starting from a single silicon-on-insulator (SOI) wafer. Functionality is validated via theoretical simulation and finite element analysis, whereas fabrication feasibility is granted by preliminary tests performed on some parts of the microsystem.

Indexed as

conjugate surface flexure hinge (CSFH)deep-reactive ion etching (DRIE)flexurelab-on-chipmicrogrippermicrostagesilicon-on-insulator (SOI) wafer

Identifiers

PMID31195703
PMCPMC6630305

What OpenQuestion holds

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LicenceCC BY
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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.