ArticleMicromachines2019
A Rapid Thermal Nanoimprint Apparatus through Induction Heating of Nickel Mold.
Article in Micromachines, 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
6 citing papers in PubMed.
- Nanoimprint lithography for scalable electronic and photonic nanomanufacturing.Discover nano · 2026Review
- UV-assisted nanoimprint lithography: the impact of the loading effect in silicon on nanoscale patterns of metalens.Nanoscale advances · 2024Article
- Thermal Nanoimprint Lithography-A Review of the Process, Mold Fabrication, and Material.Nanomaterials (Basel, Switzerland) · 2023Review
- A Strategy toward Realizing Narrow Line with High Electrical Conductivity by Electrohydrodynamic Printing.Membranes · 2022Article
- Guiding Chart for Initial Layer Choice with Nanoimprint Lithography.Nanomaterials (Basel, Switzerland) · 2021Article
- Forming of Dynamic Microstructure of Flexible Polymer.Materials (Basel, Switzerland) · 2019Article
Corrections and comments
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Authors and funding
8 authors.
Funding
Abstract
Thermal nanoimprint lithography is playing a vital role in fabricating micro/nanostructures on polymer materials by the advantages of low cost, high throughput, and high resolution. However, a typical thermal nanoimprint process usually takes tens of minutes due to the relatively low heating and cooling rate in the thermal imprint cycle. In this study, we developed an induction heating apparatus for the thermal imprint with a mold made of ferromagnetic material, nickel. By applying an external high-frequency alternating magnetic field, heat was generated by the eddy currents and magnetic hysteresis losses of the ferromagnetic nickel mold at high speed. Once the external alternating magnetic field was cut off, the system would cool down fast owe to the small thermal capacity of the nickel mold; thus, providing a high heating and cooling rate for the thermal nanoimprint process. In this paper, nanostructures were successfully replicated onto polymer sheets with the scale of 4-inch diameter within 5 min.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.