ArticleNanoscale research letters2019
Fabrication of polydimethylsiloxane nanofluidic chips under AFM tip-based nanomilling process.
Article in Nanoscale research letters, 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 5 papers.
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Who cites it
5 citing papers in PubMed, 28 citations in OpenAlex.
- Experimental Investigation of Tip Wear of AFM Monocrystalline Silicon Probes.Sensors (Basel, Switzerland) · 2023Article
- Pulse-Atomic Force Lithography: A Powerful Nanofabrication Technique to Fabricate Constant and Varying-Depth Nanostructures.Nanomaterials (Basel, Switzerland) · 2022Article
- Nanomechanical sampling of material for nanoscale mass spectrometry chemical analysis.Analytical and bioanalytical chemistry · 2021Article
- Nanofluidic devices prepared by an atomic force microscopy-based single-scratch approach.RSC advances · 2019Article
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Authors and funding
5 authors at 1 institution in 1 country.
Funding
Abstract
In current research realm, polydimethylsiloxane (PDMS)-based nanofluidic devices are widely used in medical, chemical, and biological applications. In the present paper, a novel nanomilling technique (consisting of an AFM system and a piezoelectric actuator) was proposed to fabricate nanochannels (with controllable sizes) on PDMS chips, and nanochannel size was controlled by the driving voltage and frequency inputted to the piezoelectric actuator. Moreover, microchannel and nanochannel molds were respectively fabricated by UV lithography and AFM tip-based nanomilling, and finally, PDMS slabs with micro/nanochannels were obtained by transfer process. The influences of PDMS weight ratio on nanochannel size were also investigated. The bonding process of microchannel and nanochannel slabs was conducted on a homemade alignment system consisted of an optical monocular microscope and precision stages. Furthermore, the effects of nanochannel size on electrical characteristics of KCl solution (concentration of 1 mM) were analyzed. Therefore, it can be concluded that PDMS nanofluidic devices with multiple nanochannels of sub-100-nm depth can be efficiently and economically fabricated by the proposed method.
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Registered trials
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