ArticleBeilstein journal of nanotechnology2019
On the transformation of "zincone"-like into porous ZnO thin films from sub-saturated plasma enhanced atomic layer deposition.
Article in Beilstein journal of nanotechnology, 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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Who cites it
2 citing papers in PubMed.
- Tuning the Porosity of Piezoelectric Zinc Oxide Thin Films Obtained from Molecular Layer-Deposited "Zincones".Materials (Basel, Switzerland) · 2022Article
- Study on Porosity in Zinc Oxide Ultrathin Films from Three-Step MLD Zn-Hybrid Polymers.Materials (Basel, Switzerland) · 2021Article
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Authors and funding
5 authors.
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Abstract
The synthesis of nanoporous ZnO thin films is achieved through annealing of zinc-alkoxide ("zincone"-like) layers obtained by plasma-enhanced atomic layer deposition (PE-ALD). The zincone-like layers are deposited through sub-saturated PE-ALD adopting diethylzinc and O
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