ArticleFrontiers in neuroscience2019
Microelectrode Array With Transparent ALD TiN Electrodes.
Article in Frontiers in neuroscience, 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 11 papers.
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Who cites it
11 citing papers in PubMed.
- Towards maximizing optical access through Smart Dura.Journal of neural engineering · 2026Article
- Biohybrid cochlear implants: neural interfaces, regenerative pathways, and translational benchmarks.Journal of neuroengineering and rehabilitation · 2026Review
- Advances in large-scale electrophysiology with high-density microelectrode arrays.Lab on a chip · 2025Review
- Graphene Microelectrode Arrays, 4D Structured Illumination Microscopy, and a Machine Learning Spike Sorting Algorithm Permit the Analysis of Ultrastructural Neuronal Changes During Neuronal Signaling in a Model of Niemann-Pick Disease Type C.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Article
- Graphene-based microfluidic perforated microelectrode arrays for retinal electrophysiological studies.Lab on a chip · 2023Article
- Engineering Brain Organoids: Toward Mature Neural Circuitry with an Intact Cytoarchitecture.International journal of stem cells · 2022Review
- Review
- Electrophysiology Read-Out Tools for Brain-on-Chip Biotechnology.Micromachines · 2021Review
- Transparent Microelectrode Arrays Fabricated by Ion Beam Assisted Deposition for Neuronal Cell in Vitro Recordings.Micromachines · 2020Article
- Electrophysiological Analysis of Brain Organoids: Current Approaches and Advancements.Frontiers in neuroscience · 2020Review
- Low-Temperature Atomic Layer Deposited Oxide on Titanium Nitride Electrodes Enables Culture and Physiological Recording of Electrogenic Cells.Frontiers in neuroscience · 2020Article
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Authors and funding
9 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Low noise platinum black or sputtered titanium nitride (TiN) microelectrodes are typically used for recording electrical activity of neuronal or cardiac cell cultures. Opaque electrodes and tracks, however, hinder the visibility of the cells when imaged with inverted microscope, which is the standard method of imaging cells plated on microelectrode array (MEA). Even though transparent indium tin oxide (ITO) electrodes exist, they cannot compete in impedance and noise performance with above-mentioned opaque counterparts. In this work, we propose atomic layer deposition (ALD) as the method to deposit TiN electrodes and tracks which are thin enough (25-65 nm) to be transparent (transmission ∼18-45%), but still benefit from the columnar structure of TiN, which is the key element to decrease noise and impedance of the electrodes. For ALD TiN electrodes (diameter 30 μm) impedances from 510 to 590 kΩ were measured at 1 kHz, which is less than the impedance of bare ITO electrodes. Human induced pluripotent stem cell (hiPSC)-derived cortical neurons were cultured on the ALD TiN MEAs for 14 days without observing any biocompatibility issues, and spontaneous electrical activity of the neurons was recorded successfully. The results show that transparent ALD TiN film is a suitable electrode material for producing functional MEAs.
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