ArticleNanomaterials (Basel, Switzerland)2019
Preparation and Characterization of Microsphere ZnO ALD Coating Dedicated for the Fiber-Optic Refractive Index Sensor.
Article in Nanomaterials (Basel, Switzerland), 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
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7 citing papers in PubMed.
- Growth of ZnO Nanoparticles Using Microwave Hydrothermal Method-Search for Defect-Free Particles.Nanomaterials (Basel, Switzerland) · 2025Article
- C-reactive protein (CRP) evaluation in human urine using optical sensor supported by machine learning.Scientific reports · 2024Article
- Advanced Surface Modification for 3D-Printed Titanium Alloy Implant Interface Functionalization.Frontiers in bioengineering and biotechnology · 2022Review
- Effect of Plasma-Enhanced Atomic Layer Deposition on Oxygen Overabundance and Its Influence on the Morphological, Optical, Structural, and Mechanical Properties of Al-Doped TiOMicromachines · 2021Article
- ZnO ALD-Coated Microsphere-Based Sensors for Temperature Measurements.Sensors (Basel, Switzerland) · 2020Article
- A Review of Microwave Synthesis of Zinc Oxide Nanomaterials: Reactants, Process Parameters and Morphoslogies.Nanomaterials (Basel, Switzerland) · 2020Review
- MEMS-Based Reflective Intensity-Modulated Fiber-Optic Sensor for Pressure Measurements.Sensors (Basel, Switzerland) · 2020Article
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Authors and funding
6 authors.
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Abstract
We report the fabrication of a novel fiber-optic sensor device, based on the use of a microsphere conformally coated with a thin layer of zinc oxide (ZnO) by atomic layer deposition (ALD), and its use as a refractive index sensor. The microsphere was prepared on the tip of a single-mode optical fiber, on which a conformal ZnO thin film of 200 nm was deposited using an ALD process based on diethyl zinc (DEZ) and water at 100 °C. The modified fiber-optic microsphere was examined using scanning electron microscopy and Raman spectroscopy. Theoretical modeling has been carried out to assess the structure performance, and the performed experimental measurements carried out confirmed the enhanced sensing abilities when the microsphere was coated with a ZnO layer. The fabricated refractive index sensor was operating in a reflective mode of a Fabry⁻Pérot configuration, using a low coherent measurement system. The application of the ALD ZnO coating enabled for a better measurement of the refractive index of samples in the range of the refractive index allowed by the optical fiber. The proof-of-concept results presented in this work open prospects for the sensing community and will promote the use of fiber-optic sensing technologies.
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