ArticleScientific reports2019
Electrically Reconfigurable Micromirror Array for Direct Spatial Light Modulation of Terahertz Waves over a Bandwidth Wider Than 1 THz.
Article in Scientific reports, 2019. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 5 papers.
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Who cites it
5 citing papers in PubMed.
- Enabling beam-scanning antenna technologies for terahertz wireless systems: A review.Fundamental research · 2025Review
- Micromirror Array with Adjustable Reflection Characteristics Based on Different Microstructures and Its Application.Micromachines · 2024Article
- Recent Progress of Terahertz Spatial Light Modulators: Materials, Principles and Applications.Micromachines · 2022Review
- Recent progress in terahertz metamaterial modulators.Nanophotonics (Berlin, Germany) · 2022Review
- Terahertz Reconfigurable Intelligent Surfaces (RISs) for 6G Communication Links.Micromachines · 2022Review
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Authors and funding
6 authors.
Funding
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Abstract
We report the design, fabrication and experimental investigation of a spectrally wide-band terahertz spatial light modulator (THz-SLM) based on an array of 768 actuatable mirrors with each having a length of 220 μm and a width of 100 μm. A mirror length of several hundred micrometers is required to reduce diffraction from individual mirrors at terahertz frequencies and to increase the pixel-to-pixel modulation contrast of the THz-SLM. By means of spatially selective actuation, we used the mirror array as reconfigurable grating to spatially modulate terahertz waves in a frequency range from 0.97 THz to 2.28 THz. Over the entire frequency band, the modulation contrast was higher than 50% with a peak modulation contrast of 87% at 1.38 THz. For spatial light modulation, almost arbitrary spatial pixel sizes can be realized by grouping of mirrors that are collectively switched as a pixel. For fabrication of the actuatable mirrors, we exploited the intrinsic residual stress in chrome-copper-chrome multi-layers that forces the mirrors into an upstanding position at an inclination angle of 35°. By applying a bias voltage of 37 V, the mirrors were pulled down to the substrate. By hysteretic switching, we were able to spatially modulate terahertz radiation at arbitrary pixel modulation patterns.
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Registered trials
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