ReviewMicromachines2018
Microhotplates for Metal Oxide Semiconductor Gas Sensor Applications-Towards the CMOS-MEMS Monolithic Approach.
Review in Micromachines, 2018. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 33 papers, 2 of them syntheses that pooled it.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.
Who cites it
33 citing papers in PubMed, 2 syntheses or guidelines pooled it.
- Sensors for indoor air quality monitoring and assessment through Internet of Things: a systematic review.Environmental monitoring and assessment · 2021Pooled it
- Indoor Air Quality Monitoring Systems Based on Internet of Things: A Systematic Review.International journal of environmental research and public health · 2020Pooled it
- Precision Gas Sensing Interface Circuit with Digital Potentiometer-Based Dynamic Gain Control.Sensors (Basel, Switzerland) · 2026Article
- Air Pollution Monitoring with Nanoscaled Materials in Chemoresistive Gas Sensors.ACS applied materials & interfaces · 2026Review
- UV-Activated NONanomaterials (Basel, Switzerland) · 2025Article
- Pulse-driven MEMS gas sensor combined with machine learning for selective gas identification.Microsystems & nanoengineering · 2025Article
- High-speed odor sensing using miniaturized electronic nose.Science advances · 2024Article
- Electronic Noses: From Gas-Sensitive Components and Practical Applications to Data Processing.Sensors (Basel, Switzerland) · 2024Review
- Index Air Quality Monitoring for Light and Active Mobility.Sensors (Basel, Switzerland) · 2024Article
- Adjusting surface coverage of Pt nanocatalyst decoration for selectivity control in CMOS-integrated SnONanoscale advances · 2024Article
- Effect of Pd/Pt decoration on MoSSe monolayer for CHScientific reports · 2023Article
- A Novel Packaging of the MEMS Gas Sensors Used for Harsh Outdoor and Human Exhale Sampling Applications.Sensors (Basel, Switzerland) · 2023Article
- Room-temperature ammonia gas sensing via Au nanoparticle-decorated TiODiscover nano · 2023Article
- Long-Term Operational Stability of Ta/Pt Thin-Film Microheaters: Impact of the Ta Adhesion Layer.Nanomaterials (Basel, Switzerland) · 2022Article
- Design and Fabrication of a Novel Poly-Si Microhotplate with Heat Compensation Structure.Micromachines · 2022Article
- Design, Simulation, and Fabrication of Multilayer AlSensors (Basel, Switzerland) · 2022Article
- Classification of Three Volatiles Using a Single-Type eNose with Detailed Class-Map Visualization.Sensors (Basel, Switzerland) · 2022Article
- Metal Oxide Chemiresistors: A Structural and Functional Comparison between Nanowires and Nanoparticles.Sensors (Basel, Switzerland) · 2022Review
- Correction Model for Metal Oxide Sensor Drift Caused by Ambient Temperature and Humidity.Sensors (Basel, Switzerland) · 2022Article
- Aging Behavior and Heat Treatment for Room-Temperature CO-Sensitive Pd-SnOMaterials (Basel, Switzerland) · 2022Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
4 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
The recent development of the Internet of Things (IoT) in healthcare and indoor air quality monitoring expands the market for miniaturized gas sensors. Metal oxide gas sensors based on microhotplates fabricated with micro-electro-mechanical system (MEMS) technology dominate the market due to their balance in performance and cost. Integrating sensors with signal conditioning circuits on a single chip can significantly reduce the noise and package size. However, the fabrication process of MEMS sensors must be compatible with the complementary metal oxide semiconductor (CMOS) circuits, which imposes restrictions on the materials and design. In this paper, the sensing mechanism, design and operation of these sensors are reviewed, with focuses on the approaches towards performance improvement and CMOS compatibility.
Indexed as
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What OpenQuestion holds
Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.