ArticleSensors (Basel, Switzerland)2018
Development of a Highly Sensitive Humidity Sensor Based on a Piezoelectric Micromachined Ultrasonic Transducer Array Functionalized with Graphene Oxide Thin Film.
Article in Sensors (Basel, Switzerland), 2018. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 13 papers.
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Who cites it
13 citing papers in PubMed.
- Sensor Arrays: A Comprehensive Systematic Review.Sensors (Basel, Switzerland) · 2025Review
- Recent Advances in Carbon-Based Sensors for Food and Medical Packaging Under Transit: A Focus on Humidity, Temperature, Mechanical, and Multifunctional Sensing Technologies-A Systematic Review.Materials (Basel, Switzerland) · 2025Review
- Stepped-Tube Backside Cavity Piezoelectric Ultrasound Transducer Based on ScMicromachines · 2023Article
- A review of piezoelectric MEMS sensors and actuators for gas detection application.Discover nano · 2023Review
- Piezoelectric Micromachined Ultrasound Transducer Technology: Recent Advances and Applications.Biosensors · 2022Review
- Detection of Trace Amounts of Water in Organic Solvents by DNA-Based Nanomechanical Sensors.Biosensors · 2022Article
- Piezoelectric Micromachined Ultrasonic Transducers (PMUTs): Performance Metrics, Advancements, and Applications.Sensors (Basel, Switzerland) · 2022Review
- Application of Two-Dimensional Materials towards CMOS-Integrated Gas Sensors.Nanomaterials (Basel, Switzerland) · 2022Review
- Progress of Advanced Devices and Internet of Things Systems as Enabling Technologies for Smart Homes and Health Care.ACS materials Au · 2022Review
- Fabrication and Materials Integration of Flexible Humidity Sensors for Emerging Applications.ACS omega · 2021Review
- Mass Sensors Based on Capacitive and Piezoelectric Micromachined Ultrasonic Transducers-CMUT and PMUT.Sensors (Basel, Switzerland) · 2020Review
- Modeling Indoor Relative Humidity and Wood Moisture Content as a Proxy for Wooden Home Fire Risk.Sensors (Basel, Switzerland) · 2019Article
- Stimuli-Responsive Systems in Optical Humidity-Detection Devices.Materials (Basel, Switzerland) · 2019Article
Corrections and comments
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Authors and funding
5 authors.
Funding
Abstract
A novel relative humidity sensor that is based on a linear piezoelectric micromachined ultrasonic transducer (pMUT) array was proposed and microfabricated for high sensitivity, fast response, and good stability. The humidity-sensitive graphene oxide (GO) film was deposited on the pMUT array with a facile drop-casting method and characterized by scanning electron microscope (SEM), atomic force microscope (AFM), and Fourier transform infrared spectrum (FTIR). With the humidity level ranging from 10% to 90% RH, the sensor exhibited a high sensitivity of 719 Hz/% RH and an extremely high relative sensitivity of 271.1 ppm/% RH. The humidity-sensing results also showed good short-term repeatability and long-term stability, fast response and recovery, and low hysteresis. Moreover, the temperature coefficient of frequency (TCF) of the present humidity sensor was investigated and it could be easily compensated owing to the pMUT array structure design. This work confirmed that the GO functionalized pMUT is an excellent candidate in humidity detection and it may enable many potential applications, such as ultrasensitive mass detection and simultaneous detection of multiple parameters.
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Registered trials
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