Electrical extraction of piezoelectric constants.

The piezoelectric materials are incorporated in smart structure to exhibit specific functionality. The activity of piezoelectric material dimension and electrical properties can be changed with an applied stress. These variations are translated to a change in the capacitance of the structure. This work takes a close outlook on the use of the capacitance-voltage measurements for the extraction of double piezoelectric thin film material deposited at the two faces of a flexible steel sheet. The piezoelectric thin film materials have been deposited using RF sputtering techniques. Gamry analyzer references 3000 was used to collect the capacitance-voltage measurements from both layers. The developed algorithm extracts directly the piezoelectric coefficients knowing the film thickness, the applied voltage, and the capacitance ratio. The capacitance ratio is the ratio between the capacitances of the film when the applied field in antiparallel and parallel to the polling field direction, respectively. The method has been calibrated using a piezoelectric bulk ceramic and validated by comparing the result with the reported values in the literature. The extracted values using the current approach match well the values extracted by other existing methods.