ReviewMicromachines2018
Techniques and Considerations in the Microfabrication of Parylene C Microelectromechanical Systems.
Review in Micromachines, 2018. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 54 papers.
What it found
Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.
The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
54 citing papers in PubMed.
- Repeatable, low-drift recordings in behaving nonhuman primates using flexible microelectrodes.Nature communications · 2026Article
- Biohybrid cochlear implants: neural interfaces, regenerative pathways, and translational benchmarks.Journal of neuroengineering and rehabilitation · 2026Review
- A Thin Film Transistor Backplane for Scalable Chronic Neural Interfaces.bioRxiv : the preprint server for biology · 2026Article
- Systematic evaluation of surgical insertion of flexible neural probe arrays into deeper brain targets using length modulation methods.Journal of neural engineering · 2026Article
- A Comprehensive Research Dissemination Model for Polymer-Based Neural Interfaces.IEEE transactions on bio-medical engineering · 2026Article
- Reducing Small Molecule Adsorption in a PDMS-Based Microphysiological System of the Female Reproductive Tract via Parylene-C Coating to Improve Mechanistic Studies.ACS applied materials & interfaces · 2026Article
- Robust minimally-invasive microfabricated stainless steel neural interfaces for high resolution recording.Nature communications · 2026Article
- Recent applications of parylene and pyrolyzed parylene in sensors and devices: a review.Analytical and bioanalytical chemistry · 2026Review
- Emergency delivery of particulate drugs by active ejection using in vivo wireless devices.Nature biomedical engineering · 2026Article
- Fabrication techniques for thin-walled silicone ocular implants using parylene-C coated 3D-printed molds.Discover polymers · 2026Article
- Sweat-Resistant Parylene-C Encapsulated Conductive Textiles for Active Thermal Management.Polymers · 2025Article
- High-throughput impedance monitoring in 3D tumor cultures: a multiplex, microfluidic-free platform for drug screening.Lab on a chip · 2025Article
- Microfluidic technologies for wearable and implantable biomedical devices.Lab on a chip · 2025Review
- Parylene-C Modified OSTE Molds for PDMS Microfluidic Chip Fabrication and Applications in Plasma Separation and Polymorphic Crystallization.Biosensors · 2025Article
- All-Ceramic Fiber Fabry-Perot Cavity High-Temperature Pulsating Pressure Sensor Based on HTCC.Sensors (Basel, Switzerland) · 2025Article
- Multifunctional bioelectronics for brain-body circuits.Nature reviews bioengineering · 2025Article
- Microimager: a flexible thin-film miniaturized endoscope for optical biomedical imaging.Biomedical optics express · 2025Article
- Development and Evaluation of Multi-Module Retinal Devices for Artificial Vision Applications.Micromachines · 2025Article
- Advances in the Study of Age-Related Macular Degeneration Based on Cell or Cell-Biomaterial Scaffolds.Bioengineering (Basel, Switzerland) · 2025Review
- Development of an implantable sensor system forBioactive materials · 2025Article
Corrections and comments
PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.
Authors and funding
9 authors.
Funding
Abstract
Parylene C is a promising material for constructing flexible, biocompatible and corrosion-resistant microelectromechanical systems (MEMS) devices. Historically, Parylene C has been employed as an encapsulation material for medical implants, such as stents and pacemakers, due to its strong barrier properties and biocompatibility. In the past few decades, the adaptation of planar microfabrication processes to thin film Parylene C has encouraged its use as an insulator, structural and substrate material for MEMS and other microelectronic devices. However, Parylene C presents unique challenges during microfabrication and during use with liquids, especially for flexible, thin film electronic devices. In particular, the flexibility and low thermal budget of Parylene C require modification of the fabrication techniques inherited from silicon MEMS, and poor adhesion at Parylene-Parylene and Parylene-metal interfaces causes device failure under prolonged use in wet environments. Here, we discuss in detail the promises and challenges inherent to Parylene C and present our experience in developing thin-film Parylene MEMS devices.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.