ArticleMicromachines2016
A Versatile Bonding Method for PDMS and SU-8 and Its Application towards a Multifunctional Microfluidic Device.
Article in Micromachines, 2016. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
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Who cites it
8 citing papers in PubMed.
- Adaptable Manufacturing and Biofabrication of Milliscale Organ Chips With Perfusable Vascular Beds.Biotechnology journal · 2024Article
- A surface treatment method for improving the attachment of PDMS: acoustofluidics as a case study.Scientific reports · 2023Article
- Silicone-Based Multifunctional Thin Films with Improved Triboelectric and Sensing Performances via Chemically Interfacial Modification.ACS omega · 2023Article
- Microfluidics for High Pressure: Integration on GaAs Acoustic Biosensors with a Leakage-Free PDMS Based on Bonding Technology.Micromachines · 2022Article
- Recent advances in acoustic microfluidics and its exemplary applications.Biomicrofluidics · 2022Review
- Real-Time Monitoring of Dissection Events of Single Budding Yeast in a Microfluidic Cell-Culturing Device Integrated With Electrical Impedance Biosensor.Frontiers in bioengineering and biotechnology · 2021Article
- Cell Culture on Low-Fluorescence and High-Resolution Photoresist.Micromachines · 2020Article
- A reproducible method forBiomicrofluidics · 2017Article
Corrections and comments
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Authors and funding
4 authors.
Funding
Abstract
This paper reports a versatile and irreversible bonding method for poly(dimethylsiloxane) (PDMS) and SU-8. The method is based on epoxide opening and dehydration reactions between surface-modified PDMS and SU-8. A PDMS replica is first activated via the low-cost lab equipment, i.e., the oxygen plasma cleaner or the corona treater. Then both SU-8 and plasma-treated PDMS samples are functionalized using hydrolyzed (3-aminopropyl)triethoxysilane (APTES). Ultimately, the samples are simply brought into contact and heated to enable covalent bonding. The molecular coupling and chemical reactions behind the bonding occurring at the surfaces were characterized by water contact angle measurement and X-ray photoelectron spectroscopy (XPS) analysis. The reliability of bonded PDMS-SU-8 samples was examined by using tensile strength and leakage tests, which revealed a bonding strength of over 1.4 MPa. The presented bonding method was also applied to create a metal-SU-8-PDMS hybrid device, which integrated SU-8 microfluidic structures and microelectrodes. This hybrid system was used for the effective trapping of microparticles on-chip, and the selective releasing and identification of predefined trapped microparticles. The hybrid fabrication approach presented here, based on the PDMS-SU-8 bonding, enables multifunctional integration in complex microfluidic devices.
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Registered trials
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