Evidence map›Paper›PMID 30404348›Full record

ArticleMicromachines2016

In-Situ Testing of the Thermal Diffusivity of Polysilicon Thin Films.

Yi-Fan Gu, Zai-Fa Zhou, Chao Sun, Wei-Hua Li, Qing-An Huang

Abstract read
In one paragraph

Article in Micromachines, 2016. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Not yet cited in PubMed.

0numbers the graph read from it
0cells of the map it votes in
0citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

0 citing papers in PubMed.

No citing paper in PubMed yet.

4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

5 authors.

Yi-Fan GuKey Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China. yfgu@seu.edu.cn.
Zai-Fa ZhouKey Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China. zfzhou@seu.edu.cn.ORCID 0000-0002-2608-8480
Chao SunKey Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China. sun_chaos@hotmail.com.
Wei-Hua LiKey Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China. liwh@seu.edu.cn.
Qing-An HuangKey Laboratory of MEMS of the Ministry of Education, Southeast University, Nanjing 210096, China. hqa@seu.edu.cn.ORCID 0000-0002-0646-7635

Funding

National High Technology Program of P.R.China 2015AA042604
6 · The paper itself

Abstract

This paper presents an intuitive yet effective in-situ thermal diffusivity testing structure and testing method. The structure consists of two doubly clamped beams with the same width and thickness but different lengths. When the electric current is applied through two terminals of one beam, the beam serves as thermal resistor and the resistance

Indexed as

in-situ testingprocess control monitoring (PCM)thermal diffusivitythin film

Identifiers

PMID30404348
PMCPMC6189791

What OpenQuestion holds

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LicenceCC BY
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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.