ArticleMicromachines2017
Micromachined Resonant Frequency Tuning Unit for Torsional Resonator.
Article in Micromachines, 2017. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 4 papers.
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Who cites it
4 citing papers in PubMed.
- Figure of Merit Enhancement of Laterally Vibrating RF-MEMS Resonators via Energy-Preserving Addendum Frame.Micromachines · 2022Article
- Analysis of Frequency Drift of Silicon MEMS Resonator with Temperature.Micromachines · 2020Article
- Editorial for the Special Issue on Micro-Resonators: The Quest for Superior Performance.Micromachines · 2018Article
- Monostable Dynamic Analysis of Microbeam-Based Resonators via an Improved One Degree of Freedom Model.Micromachines · 2018Article
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Authors and funding
5 authors.
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Abstract
Achieving the desired resonant frequency of resonators has been an important issue, since it determines their performance. This paper presents the design and analysis of two concepts for the resonant frequency tuning of resonators. The proposed methods are based on the stiffness alteration of the springs by geometrical modification (shaft-widening) or by mechanical restriction (shaft-holding) using micromachined frequency tuning units. Our designs have advantages in (1) reversible and repetitive tuning; (2) decoupled control over the amplitude of the resonator and the tuning ratio; and (3) a wide range of applications including torsional resonators. The ability to tune the frequency by both methods is predicted by finite element analysis (FEA) and experimentally verified on a torsional resonator driven by an electrostatic actuator. The tuning units and resonators are fabricated on a double silicon-on-insulator (DSOI) wafer to electrically insulate the resonator from the tuning units. The shaft-widening type and shaft-holding type exhibit a maximum tuning ratio of 5.29% and 10.7%, respectively.
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