ArticleScientific reports2018
MEMS terahertz-to-infrared band converter using frequency selective planar metamaterial.
Article in Scientific reports, 2018. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
What it found
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Who cites it
8 citing papers in PubMed.
- Using light to image millimeter wave based on stacked meta-MEMS chip.Light, science & applications · 2025Article
- Development of Polarization-Insensitive THz-to-IR Converters for Low-IR-Signature Target Detection and Imaging.Sensors (Basel, Switzerland) · 2024Article
- All-dielectric polarization-sensitive metasurface for terahertz polarimetric imaging.Scientific reports · 2024Article
- Dynamic selection of visible wavelengths using resonant TiONanophotonics (Berlin, Germany) · 2023Article
- Terahertz-to-infrared converters for imaging the human skin cancer: challenges and feasibility.Journal of medical imaging (Bellingham, Wash.) · 2023Article
- Recent Advances in Reconfigurable Metasurfaces: Principle and Applications.Nanomaterials (Basel, Switzerland) · 2023Review
- A Robust Infrared Transducer of an Ultra-Large-Scale Array.Sensors (Basel, Switzerland) · 2020Article
- Design of a Broadband Solar Thermal Absorber Using a Deep Neural Network and Experimental Demonstration of Its Performance.Scientific reports · 2019Article
Corrections and comments
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Authors and funding
4 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
A MEMS terahertz-to-infrared converter has been developed based on the unique properties of metamaterials that allow for selective control of the absorptivity and emissivity of the sensors. The converter consists of a sensing element structurally made of planar metamaterial membranes, connected to a substrate frame by four symmetrically-located thermal insulators. Upon THz absorption, the temperature of the sensing element increases and the outward infrared flux from the backside of the element is read by a commercial long-wave infrared camera. Two configurations were designed and fabricated with metamaterial absorptivity optimized for 3.8 THz and 4.75 THz quantum cascade lasers. The first sensor, fabricated with an oxidized aluminum backside, exhibits higher responsivity, but lower conversion efficiency than the second sensor, fabricated with a metamaterial backside. The spectral characteristics of the metamaterial on the two sides can be optimized to improve both responsivity and sensitivity, while keeping the sensors' thermal time constant sufficiently small for real time imaging. No dedicated electronics or optics are required for readout making metamaterial-based MEMS THz-to-IR converters very attractive for THz imaging as means of a simple attachment to commercial IR cameras.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.