ArticleNanomaterials (Basel, Switzerland)2018
Feasible Route for a Large Area Few-Layer MoS₂ with Magnetron Sputtering.
Article in Nanomaterials (Basel, Switzerland), 2018. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
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Who cites it
6 citing papers in PubMed, 39 citations in OpenAlex.
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- One-step sputtering of MoSSe metastable phase as thin film and predicted thermodynamic stability by computational methods.Scientific reports · 2024Article
- Double Negative Differential Resistance Device Based on Hafnium Disulfide/Pentacene Hybrid Structure.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2020Article
- Preparation and Properties of 2D Materials.Nanomaterials (Basel, Switzerland) · 2020Article
- A study on the tribological property of MoSRSC advances · 2020Article
- A Universal Solution of Controlling the Distribution of Multimaterials during Macroscopic Manipulation via a Microtopography-Guided Substrate.Nanomaterials (Basel, Switzerland) · 2018Article
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Authors and funding
7 authors at 2 institutions in 2 countries.
Funding
No grant is acknowledged in the PubMed record.
Abstract
In this article, we report continuous and large-area molybdenum disulfide (MoS₂) growth on a SiO₂/Si substrate by radio frequency magnetron sputtering (RFMS) combined with sulfurization. The MoS₂ film was synthesized using a two-step method. In the first step, a thin MoS₂ film was deposited by radio frequency (RF) magnetron sputtering at 400 °C with different sputtering powers. Following, the as-sputtered MoS₂ film was further subjected to the sulfurization process at 600 °C for 60 min. Sputtering combined with sulfurization is a viable route for large-area few-layer MoS₂ by controlling the radio-frequency magnetron sputtering power. A relatively simple growth strategy is demonstrated here that simultaneously enhances thin film quality physically and chemically. Few-layers of MoS₂ are established using Raman spectroscopy, X-ray diffractometer, high-resolution field emission transmission electron microscope, and X-ray photoelectron spectroscopy measurements. Spectroscopic and microscopic results reveal that these MoS₂ layers are of low disorder and well crystallized. Moreover, high quality few-layered MoS₂ on a large-area can be achieved by controlling the radio-frequency magnetron sputtering power.
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