ArticleSensors (Basel, Switzerland)2018
Modeling and Analysis of a Novel Ultrasensitive Differential Resonant Graphene Micro-Accelerometer with Wide Measurement Range.
Article in Sensors (Basel, Switzerland), 2018. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
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Who cites it
8 citing papers in PubMed.
- Research Progress of Graphene Nano-Electromechanical Resonant Sensors-A Review.Micromachines · 2022Review
- A Review on Graphene-Based Nano-Electromechanical Resonators: Fabrication, Performance, and Applications.Micromachines · 2022Review
- A Novel Two-Axis Differential Resonant Accelerometer Based on Graphene with Transmission Beams.Sensors (Basel, Switzerland) · 2022Article
- An Ultrahigh-Sensitivity Graphene Resonant Gyroscope.Nanomaterials (Basel, Switzerland) · 2021Article
- Development and Proof of Concept of a Miniaturized MEMS Quantum Tunneling Accelerometer Based on PtC Tips by Focused Ion Beam 3D Nano-Patterning.Sensors (Basel, Switzerland) · 2021Article
- Nanoelectromechanical Sensors Based on Suspended 2D Materials.Research (Washington, D.C.) · 2020Review
- Stress-Insensitive Resonant Graphene Mass Sensing via Frequency Ratio.Sensors (Basel, Switzerland) · 2019Article
- Opto-thermally Excited Fabry-Perot Resonance Frequency Behaviors of Clamped Circular Graphene Membrane.Nanomaterials (Basel, Switzerland) · 2019Article
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Authors and funding
4 authors.
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Abstract
A novel, ultrahigh-sensitivity wide-range resonant micro-accelerometer using two differential double-clamped monolayer graphene beams is designed and investigated by steady-state simulation via COMSOL Multiphysics software in this paper. Along with stiffness-enhanced optimized folded support beams, two symmetrical 3-GPa prestressed graphene nano-beams serve as resonant sensitive elements with a size of 10 μm × 1 μm (length × width) to increase the acceleration sensitivity while extending the measurement range. The simulation results show that the accelerometer with cascade-connected graphene and proof-mass assembly exhibits the ultrahigh sensitivity of 21,224 Hz/g and quality factor of 9773 in the range of 0⁻1000 g. This is remarkably superior to previously reported studies characterized by attaching proof mass to the graphene components directly. The proposed accelerometer shows great potential as an alternative to quartz and silicon-based resonant sensors in high-impact and highly sensitive inertial measurement applications.
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