ArticleScientific reports2018
Two-step breakdown of a SiN membrane for nanopore fabrication: Formation of thin portion and penetration.
Article in Scientific reports, 2018. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
What it found
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Who cites it
6 citing papers in PubMed.
- Probing nanopore surface chemistry through real-time measurements of nanopore conductance response to pH changes.The Review of scientific instruments · 2023Article
- Localized Nanopore Fabrication via Controlled Breakdown.Nanomaterials (Basel, Switzerland) · 2022Review
- Simple Fabrication of Solid-State Nanopores on a Carbon Film.Micromachines · 2021Article
- Fast Fabrication of Solid-State Nanopores for DNA Molecule Analysis.Nanomaterials (Basel, Switzerland) · 2021Article
- Understanding Electrical Conduction and Nanopore Formation During Controlled Breakdown.Small (Weinheim an der Bergstrasse, Germany) · 2021Article
- Stable fabrication of a large nanopore by controlled dielectric breakdown in a high-pH solution for the detection of various-sized molecules.Scientific reports · 2019Article
Corrections and comments
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Authors and funding
4 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
For the nanopore sensing of various large molecules, such as probe-labelled DNA and antigen-antibody complexes, the nanopore size has to be customized for each target molecule. The recently developed nanopore fabrication method utilizing dielectric breakdown of a membrane is simple and quite inexpensive, but it is somewhat unsuitable for the stable fabrication of a single large nanopore due to the risk of generating multiple nanopores. To overcome this bottleneck, we propose a new technique called "two-step breakdown" (TSB). In the first step of TSB, a local conductive thin portion (not a nanopore) is formed in the membrane by dielectric breakdown. In the second step, the created thin portion is penetrated by voltage pulses whose polarity is opposite to the polarity of the voltage used in the first step. By applying TSB to a 20-nm-thick SiN membrane, a single nanopore with a diameter of 21-26 nm could be fabricated with a high yield of 83%.
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Registered trials
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