ArticleSensors (Basel, Switzerland)2018
Design and Fabrication of Full Wheatstone-Bridge-Based Angular GMR Sensors.
Article in Sensors (Basel, Switzerland), 2018. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
3 citing papers in PubMed.
- Spin orbit torque locally controlling exchange bias to realize high detection sensitivity of two-dimensional magnetic field.Fundamental research · 2025Article
- A Spin Valve-Based Rhombus-Shaped Micro-Object Implementing a Full Wheatstone Bridge.Sensors (Basel, Switzerland) · 2024Article
- Alignment-Free Sensing Module for Absolute and Incremental Lines in Linear Positioning System Based on Tunneling-Magnetoresistance Sensors.Sensors (Basel, Switzerland) · 2021Article
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Authors and funding
8 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Since the discovery of the giant magnetoresistive (GMR) effect, GMR sensors have gained much attention in last decades due to their high sensitivity, small size, and low cost. The full Wheatstone-bridge-based GMR sensor is most useful in terms of the application point of view. However, its manufacturing process is usually complex. In this paper, we present an efficient and concise approach to fabricate a full Wheatstone-bridge-based angular GMR sensor by depositing one GMR film stack, utilizing simple patterned processes, and a concise post-annealing procedure based on a special layout. The angular GMR sensor is of good linear performance and achieves a sensitivity of 0.112 mV/V/Oe at the annealing temperature of 260 °C in the magnetic field range from -50 to +50 Oe. This work provides a design and method for GMR-sensor manufacturing that is easy for implementation and suitable for mass production.
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