ReviewSensors (Basel, Switzerland)2018
Reactive Sputtering of Aluminum Nitride (002) Thin Films for Piezoelectric Applications: A Review.
Review in Sensors (Basel, Switzerland), 2018. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 25 papers.
What it found
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Who cites it
25 citing papers in PubMed.
- Self-Assembled Inorganic Nanomembrane Tubes: Rolled-Up Piezoelectrics for Microacoustic Wave-Based Actuators and Sensors.Advanced materials (Deerfield Beach, Fla.) · 2026Article
- Sputtered Piezoelectric AlN Thin Films: Parameter Optimisation, Deposition Challenges, and Emerging Perspectives-A Review.Micromachines · 2026Review
- Broad Beam Plasma Enhanced Low-Temperature Growth of Oriented Aluminum Nitride Thin Films.ACS applied materials & interfaces · 2025Article
- Recent progress in aluminum nitride for piezoelectric MEMS mirror applications: enhancements with scandium doping.Microsystems & nanoengineering · 2025Review
- Residual Stresses and Micro-voids Propel Metal Diffusion for Filament-Based Memristors.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2025Article
- Recent Advances in AlN-Based Acoustic Wave Resonators.Micromachines · 2025Review
- MEMS Acoustic Sensors: Charting the Path from Research to Real-World Applications.Micromachines · 2024Review
- Thin Conducting Films: Preparation Methods, Optical and Electrical Properties, and Emerging Trends, Challenges, and Opportunities.Materials (Basel, Switzerland) · 2024Review
- Stepped-Tube Backside Cavity Piezoelectric Ultrasound Transducer Based on ScMicromachines · 2023Article
- A fluid model of pulsed direct current planar magnetron discharge.Scientific reports · 2023Article
- Impact of Pulse Parameters of a DC Power Generator on the Microstructural and Mechanical Properties of Sputtered AlN Film with In-Situ OES Data Analysis.Materials (Basel, Switzerland) · 2023Article
- Charge-optimized many-body interaction potential for AlN revisited to explore plasma-surface interactions.Scientific reports · 2023Article
- Bimorph Dual-Electrode ScAlN PMUT with Two Terminal Connections.Micromachines · 2022Article
- Thermomechanical Response of Polycarbonate/Aluminum Nitride Nanocomposites in Material Extrusion Additive Manufacturing.Materials (Basel, Switzerland) · 2022Article
- Optimal Growth Conditions for FormingMicromachines · 2022Article
- Electrical Properties of Aluminum Nitride Thick Films Magnetron Sputtered on Aluminum Substrates.Materials (Basel, Switzerland) · 2022Article
- The Influence of Argon Cluster Ion Bombardment on the Characteristics of AlN Films on Glass-Ceramics and Si Substrates.Nanomaterials (Basel, Switzerland) · 2022Article
- Aluminum Nitride to Silicon Direct Bonding for an Alternative Silicon-On-Insulator Platform.ACS applied materials & interfaces · 2021Article
- Machine Learning Assisted Classification of Aluminum Nitride Thin Film Stress via In-Situ Optical Emission Spectroscopy Data.Materials (Basel, Switzerland) · 2021Article
- Review
Corrections and comments
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Authors and funding
2 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
We summarize the recipes and describe the role of sputtering parameters in producing highly c-axis Aluminum Nitride (AlN) films for piezoelectric applications. The information is collated from the analysis of around 80 journal articles that sputtered this film on variety of substrate materials, processes and equipment. This review will be a good starting point to catch up with the state-of-the-arts research on the reactive sputtering of AlN (002) thin film, as well as its evolving list of piezoelectric applications such as energy harvesters.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.