ArticleSensors (Basel, Switzerland)2018
Design of a Novel MEMS Microgripper with Rotatory Electrostatic Comb-Drive Actuators for Biomedical Applications.
Article in Sensors (Basel, Switzerland), 2018. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 8 papers.
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Who cites it
8 citing papers in PubMed.
- Impact of Solid Materials in the Gap Space between Driving Electrodes in a MEMS Tri-Electrode Electrostatic Actuator.Sensors (Basel, Switzerland) · 2024Article
- An Aluminum Electro-Thermally Actuated Micro-Tweezer: Manufacturing and Characterization.Micromachines · 2023Article
- Development of Electrostatic Microactuators: 5-Year Progress in Modeling, Design, and Applications.Micromachines · 2022Review
- Design and Analysis of a Microgripper with Three-Stage Amplification Mechanism for Micromanipulation.Micromachines · 2022Article
- Laser Actuated Microgripper Using Optimized Chevron-Shaped Actuator.Micromachines · 2021Article
- Compliant Nano-Pliers as a Biomedical Tool at the Nanoscale: Design, Simulation and Fabrication.Micromachines · 2020Article
- Dual-Stimuli Responsive Carbon Nanotube Sponge-PDMS Amphibious Actuator.Nanomaterials (Basel, Switzerland) · 2019Article
- Design and Validation of a Single-SOI-Wafer 4-DOF Crawling Microgripper.Micromachines · 2019Article
Corrections and comments
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Authors and funding
5 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
Primary tumors of patients can release circulating tumor cells (CTCs) to flow inside of their blood. The CTCs have different mechanical properties in comparison with red and white blood cells, and their detection may be employed to study the efficiency of medical treatments against cancer. We present the design of a novel MEMS microgripper with rotatory electrostatic comb-drive actuators for mechanical properties characterization of cells. The microgripper has a compact structural configuration of four polysilicon layers and a simple performance that control the opening and closing displacements of the microgripper tips. The microgripper has a mobile arm, a fixed arm, two different actuators and two serpentine springs, which are designed based on the SUMMiT V surface micromachining process from Sandia National Laboratories. The proposed microgripper operates at its first rotational resonant frequency and its mobile arm has a controlled displacement of 40 µm at both opening and closing directions using dc and ac bias voltages. Analytical models are developed to predict the stiffness, damping forces and first torsional resonant frequency of the microgripper. In addition, finite element method (FEM) models are obtained to estimate the mechanical behavior of the microgripper. The results of the analytical models agree very well respect to FEM simulations. The microgripper has a first rotational resonant frequency of 463.8 Hz without gripped cell and it can operate up to with maximum dc and ac voltages of 23.4 V and 129.2 V, respectively. Based on the results of the analytical and FEM models about the performance of the proposed microgripper, it could be used as a dispositive for mechanical properties characterization of circulating tumor cells (CTCs).
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