ArticleNanotechnology2018
Lithography-based fabrication of nanopore arrays in freestanding SiN and graphene membranes.
Article in Nanotechnology, 2018. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 28 papers.
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The trial behind it
Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.
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Who cites it
28 citing papers in PubMed.
- Stress-induced ripping enables fabrication of nanopores with dimensions smaller than the resolution limit of the employed lithography.Science advances · 2026Article
- Interrogating nanopores with light: optipore sensing for single molecule analyses.Journal of nanobiotechnology · 2026Review
- Heterogeneous Nanopore Arrays - Selective Modification of Nanopores Embedded in a Membrane.Advanced materials (Deerfield Beach, Fla.) · 2025Article
- Full-length protein classification via cysteine fingerprinting in solid-state nanopores.Nature nanotechnology · 2025Article
- The Electric Field in Solid State Nanopores Causes Dissociation of Strong Biomolecular Interactions.Nano letters · 2025Article
- Transmembrane voltage-gated nanopores controlled by electrically tunable in-pore chemistry.Nature communications · 2025Article
- Localized Nanopore Fabrication in Silicon Nitride Membranes by Femtosecond Laser Exposure and Subsequent Controlled Breakdown.ACS applied materials & interfaces · 2025Article
- 2D Materials for Potable Water Application: Basic Nanoarchitectonics and Recent Progresses.Small (Weinheim an der Bergstrasse, Germany) · 2024Review
- A DNA turbine powered by a transmembrane potential across a nanopore.Nature nanotechnology · 2024Article
- Label-Free Imaging of DNA Interactions with 2D Materials.ACS photonics · 2024Article
- The New Era of High-Throughput Nanoelectrochemistry.Analytical chemistry · 2023Review
- Nanopore fingerprinting of supramolecular DNA nanostructures.Biophysical journal · 2022Article
- Drilling accurate nanopores for biosensors by energetic multi-wall carbon nanotubes: a molecular dynamics investigation.Journal of molecular modeling · 2022Article
- Localized Nanopore Fabrication via Controlled Breakdown.Nanomaterials (Basel, Switzerland) · 2022Review
- Electronic Mapping of a Bacterial Genome with Dual Solid-State Nanopores and Active Single-Molecule Control.ACS nano · 2022Article
- Graphene Nanopore Arrays for Electron Focusing and Antifocusing.Nanomaterials (Basel, Switzerland) · 2022Article
- Article
- Lithographic Processes for the Scalable Fabrication of Micro- and Nanostructures for Biochips and Biosensors.ACS sensors · 2021Review
- Prospects of Observing Ionic Coulomb Blockade in Artificial Ion Confinements.Entropy (Basel, Switzerland) · 2020Article
- Article
Corrections and comments
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Authors and funding
3 authors.
Funding
Abstract
We report a simple and scalable technique for the fabrication of nanopore arrays on freestanding SiN and graphene membranes based on electron-beam lithography and reactive ion etching. By controlling the dose of the single-shot electron-beam exposure, circular nanopores of any size down to 16 nm in diameter can be fabricated in both materials at high accuracy and precision. We demonstrate the sensing capabilities of these nanopores by translocating dsDNA through pores fabricated using this method, and find signal-to-noise characteristics on par with transmission-electron-microscope-drilled nanopores. This versatile lithography-based approach allows for the high-throughput manufacturing of nanopores and can in principle be used on any substrate, in particular membranes made out of transferable two-dimensional materials.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.