ArticleSensors (Basel, Switzerland)2018
Optical-Interferometry-Based CMOS-MEMS Sensor Transduced by Stress-Induced Nanomechanical Deflection.
Article in Sensors (Basel, Switzerland), 2018. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 5 papers.
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Who cites it
5 citing papers in PubMed.
- Micro-Electro-Mechanical Systems in Light Stabilization.Sensors (Basel, Switzerland) · 2023Article
- Bio-Interface on Freestanding Nanosheet of Microelectromechanical System Optical Interferometric Immunosensor for Label-Free Attomolar Prostate Cancer Marker Detection.Sensors (Basel, Switzerland) · 2022Article
- A ppm Ethanol Sensor Based on Fabry-Perot Interferometric Surface Stress Transducer at Room Temperature.Sensors (Basel, Switzerland) · 2020Article
- A suspended graphene-based optical interferometric surface stress sensor for selective biomolecular detection.Nanoscale advances · 2020Article
- Kirchhoff's metasurfaces towards efficient photo-thermal energy conversion.Scientific reports · 2019Article
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Authors and funding
4 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
We developed a Fabry-Perot interferometer sensor with a metal-oxide-semiconductor field-effect transistor (MOSFET) circuit for chemical sensing. The novel signal transducing technique was performed in three steps: mechanical deflection, transmittance change, and photocurrent change. A small readout photocurrent was processed by an integrated source follower circuit. The movable film of the sensor was a 350-nm-thick polychloro-para-xylylene membrane with a diameter of 100 µm and an air gap of 300 nm. The linearity of the integrated source follower circuit was obtained. We demonstrated a gas response using 80-ppm ethanol detected by small membrane deformation of 50 nm, which resulted in an output-voltage change with the proposed high-efficiency transduction.
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Registered trials
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