ArticleSensors (Basel, Switzerland)2018
Atomic Force Microscopy Sidewall Imaging with a Quartz Tuning Fork Force Sensor.
Article in Sensors (Basel, Switzerland), 2018. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 1 paper.
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Who cites it
1 citing paper in PubMed.
- Analysis of the Frequency Shift versus Force Gradient of a Dynamic AFM Quartz Tuning Fork Subject to Lennard-Jones Potential Force.Sensors (Basel, Switzerland) · 2019Article
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Authors and funding
5 authors.
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Abstract
Sidewall roughness measurement is becoming increasingly important in the micro-electromechanical systems and nanoelectronics devices. Atomic force microscopy (AFM) is an emerging technique for sidewall scanning and roughness measurement due to its high resolution, three-dimensional imaging capability and high accuracy. We report an AFM sidewall imaging method with a quartz tuning fork (QTF) force sensor. A self sensing and actuating force sensor is fabricated by microassembling a commercial AFM cantilever (tip apex radius ≤10 nm) to a QTF. The attached lightweight cantilever allows high-sensitivity force detection (7.4% Q factor reduction) and sidewall imaging with high lateral resolution. Owing to its unique configuration, the tip of the sensor can detect sidewall surface orthogonally during imaging, which reduces lateral friction. In experiments, sidewalls of a micro-electro-mechanical system (MEMS) structure fabricated by deep reactive ion etching process and a standard step grating are scanned and the sidewall roughness, line edge roughness and sidewall angles are measured.
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