Evidence map›Paper›PMID 29292722›Full record

ArticleSensors (Basel, Switzerland)2017

High-Speed Focus Inspection System Using a Position-Sensitive Detector.

Binh Xuan Cao, Phuong Le Hoang, Sanghoon Ahn, Heeshin Kang, Jengo Kim, Jiwhan Noh

Abstract read
In one paragraph

Article in Sensors (Basel, Switzerland), 2017. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.

0numbers the graph read from it
0cells of the map it votes in
2citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

2 citing papers in PubMed.

  1. Article
  2. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors.

Binh Xuan CaoDepartment of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea. xuanbinh.cao@gmail.com.ORCID 0000-0002-1331-0636
Phuong Le HoangDepartment of Material Science and Engineering, Korea Advanced Institute of Science and Technology (KAIST), Daejeon 34141, Korea. hoanglephuong93@kaist.ac.kr.
Sanghoon AhnDepartment of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea. Shahn@kimm.re.kr.
Heeshin KangDepartment of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea. khs@kimm.re.kr.
Jengo KimDepartment of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea. jokim@kimm.re.kr.
Jiwhan NohDepartment of Laser and Electron Beam Application, Korea Institute of Machinery & Materials (KIMM), Daejeon 34103, Korea. njw733@kimm.re.kr.

Funding

No grant is acknowledged in the PubMed record.

6 · The paper itself

Abstract

Precise and rapid focus detection is an essential operation in several manufacturing processes employing high-intensity lasers. However, the detection resolution of existing methods is notably low. This paper proposes a technique that provides a rapid-response, high-precision, and high-resolution focus inspection system on the basis of geometrical optics and advanced optical instruments. An ultrafast interface position detector and a single-slit mask are used in the system to precisely signal the focus position with high resolution. The reflected images on the image sensor are of a high quality, and this quality is maintained persistently when the target surface is shifted along the optical axis. The proposed system developed for focus inspection is simple and inexpensive, and is appropriate for practical use in the industrial production of sophisticated structures such as microcircuits and microchips.

Indexed as

CCD camerafocal position detectionlaser micromachiningposition-sensitive detectorsingle-slit masks

Identifiers

PMID29292722
PMCPMC5751675

What OpenQuestion holds

Textmetadata
LicenceCC BY
Read underepoch 390

Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.