ArticleJournal of neural engineering2018
Amorphous silicon carbide ultramicroelectrode arrays for neural stimulation and recording.
Article in Journal of neural engineering, 2018. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 46 papers.
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Who cites it
46 citing papers in PubMed.
- Minimally invasive implantation of scalable high-density cortical microelectrode arrays for multimodal neural decoding and stimulation.Nature biomedical engineering · 2026Article
- Mechanics of Long-Shank 5 mm Neural Probe Insertion into the Rat Brain: Effects of Geometry and Vibration-Assisted Insertion.Micromachines · 2026Article
- Tantalum Interconnect Metallization for Thin-Film Neural Interface Devices.Micromachines · 2026Article
- Electrical characterization and accelerated aging of amorphous silicon carbide implantable encapsulation.Journal of neural engineering · 2025Article
- Iris 128x: open-source 128 channel headstages for neural stimulation and recording.Journal of neural engineering · 2025Article
- Monolithic three-dimensional neural probes from deterministic rolling of soft electronics.Nature electronics · 2025Article
- Electrochemical stability and neural recording with sputtered ruthenium oxide electrodes subchronically in rat motor cortex.Journal of neural engineering · 2025Article
- Amorphous silicon carbide probe mechanics for insertion in the cerebral cortex of rats, pigs, and macaques.Journal of neural engineering · 2025Article
- Parasitic Capacitance in High-Density Neural Electrode Arrays: Sources and Evaluation Methods.IEEE transactions on bio-medical engineering · 2025Article
- Enhanced Performance of Novel Amorphous Silicon Carbide Microelectrode Arrays in Rat Motor Cortex.Micromachines · 2025Article
- In vivo microelectrode arrays for neuroscience.Nature reviews. Methods primers · 2025Article
- Advancing glassy carbon microelectrode arrays for neurochemical sensing: impact of double pyrolysis on structure and function.Frontiers in bioengineering and biotechnology · 2025Article
- Failure behavior of polymer microelectrode arrays encapsulated with conventional ALD and 3D-ALI barriers.Frontiers in bioengineering and biotechnology · 2025Article
- Neuronal activity in the ventral tegmental area during goal-directed navigation recorded by low-curvature microelectrode arrays.Microsystems & nanoengineering · 2024Article
- The Effect of Physical Structural Properties on Electrochemical Properties of Ruthenium Oxide for Neural Stimulating and Recording Electrodes.Annual International Conference of the IEEE Engineering in Medicine and Biology Society. IEEE Engineering in Medicine and Biology Society. Annual International Conference · 2024Article
- Planar amorphous silicon carbide microelectrode arrays for chronic recording in rat motor cortex.Biomaterials · 2024Article
- Amorphous SiC Thin Films Deposited by Plasma-Enhanced Chemical Vapor Deposition for Passivation in Biomedical Devices.Materials (Basel, Switzerland) · 2024Review
- Recent Advancements in Graphene-Based Implantable Electrodes for Neural Recording/Stimulation.Sensors (Basel, Switzerland) · 2023Review
- Translational opportunities and challenges of invasive electrodes for neural interfaces.Nature biomedical engineering · 2023Review
- Charge Injection Enhancement Comparisons of Iridium Oxide MicroelectrodesInternational IEEE/EMBS Conference on Neural Engineering : [proceedings]. International IEEE EMBS Conference on Neural Engineering · 2023Article
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Authors and funding
6 authors.
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Abstract
objectiveForeign body response to indwelling cortical microelectrodes limits the reliability of neural stimulation and recording, particularly for extended chronic applications in behaving animals. The extent to which this response compromises the chronic stability of neural devices depends on many factors including the materials used in the electrode construction, the size, and geometry of the indwelling structure. Here, we report on the development of microelectrode arrays (MEAs) based on amorphous silicon carbide (a-SiC). APPROACH: This technology utilizes a-SiC for its chronic stability and employs semiconductor manufacturing processes to create MEAs with small shank dimensions. The a-SiC films were deposited by plasma enhanced chemical vapor deposition and patterned by thin-film photolithographic techniques. To improve stimulation and recording capabilities with small contact areas, we investigated low impedance coatings on the electrode sites. The assembled devices were characterized in phosphate buffered saline for their electrochemical properties. MAIN
resultsMEAs utilizing a-SiC as both the primary structural element and encapsulation were fabricated successfully. These a-SiC MEAs had 16 penetrating shanks. Each shank has a cross-sectional area less than 60 µm SIGNIFICANCE: The a-SiC MEAs provide a significant advancement in the development of microelectrodes that over the years has relied on silicon platforms for device manufacture. These flexible a-SiC MEAs have the potential for decreased tissue damage and reduced foreign body response. The technique is promising and has potential for clinical translation and large scale manufacturing.
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Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.