ArticleSensors (Basel, Switzerland)2017
Piezoelectric Actuated Phase Shifter Based on External Laser Interferometer: Design, Control and Experimental Validation.
Article in Sensors (Basel, Switzerland), 2017. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 6 papers.
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Who cites it
6 citing papers in PubMed.
- An Efficient and High-Accuracy Modeling and Design Method for High-Load, Large-Stroke Piezo-Actuated Compliant Amplification Mechanisms.Micromachines · 2026Article
- High-Precision Positioning Stage Control Based on a Modified Disturbance Observer.Sensors (Basel, Switzerland) · 2024Article
- Development of a Compound Speckle Interferometer for Precision Three-Degree-of-Freedom Displacement Measurement.Sensors (Basel, Switzerland) · 2021Article
- Research on Precision Blanking Process Design of Micro Gear Based on Piezoelectric Actuator.Micromachines · 2021Article
- Research on a New Type of Rigid-Flexible Coupling 3-DOF Micro-Positioning Platform.Micromachines · 2020Article
- Hysteresis Modelling and Feedforward Control of Piezoelectric Actuator Based on Simplified Interval Type-2 Fuzzy System.Sensors (Basel, Switzerland) · 2020Article
Corrections and comments
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Authors and funding
7 authors.
Funding
No grant is acknowledged in the PubMed record.
Abstract
To improve the phase-shifting accuracy, this paper presents a novel integrated framework for design, control and experimental validation of the piezoelectric actuated phase shifter with a trade-off between accuracy and cost. The piezoelectric actuators with built-in sensors are adopted to drive the double parallel four-bar linkage flexure hinge-based mechanisms. Three mechanisms form the tripod structure of the assembled phase shifter. Then, a semi-closed loop controller with inner feedback and outer feedforward loops via the external laser interferometer is developed for accurate positioning of the phase shifter. Finally, experiments related with travel range, step response, linearity and repeatability are carried out. The linearity error is 0.21% and the repeatability error of 10 μ m displacement is 3 nm. The results clearly demonstrate the good performance of the developed phase shifter and the feasibility of the proposed integrated framework.
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