ArticleAdvanced materials (Deerfield Beach, Fla.)2017
Dielectrophoresis-Assisted Integration of 1024 Carbon Nanotube Sensors into a CMOS Microsystem.
Article in Advanced materials (Deerfield Beach, Fla.), 2017. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 11 papers.
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Who cites it
11 citing papers in PubMed.
- CMOS Electrokinetic Systems and Fabrication Approaches for On-CMOS 3D Electrodes.Electrophoresis · 2026Review
- A Review on AC-Dielectrophoresis of Nanoparticles.Micromachines · 2025Review
- Ionic Strength-Mediated "DNA Corona Defects" for Efficient Arrangement of Single-Walled Carbon Nanotubes.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2024Article
- Wafer-Scale Graphene Field-Effect Transistor Biosensor Arrays with Monolithic CMOS Readout.ACS applied electronic materials · 2023Article
- Post-CMOS processing challenges and design developments of CMOS-MEMS microheaters for local CNT synthesis.Microsystems & nanoengineering · 2023Article
- Multisite Dopamine Sensing With Femtomolar Resolution Using a CMOS Enabled Aptasensor Chip.Frontiers in neuroscience · 2022Article
- Dielectrophoresis: Developments and applications from 2010 to 2020.Electrophoresis · 2021Review
- Nanoscale Patterning of Carbon Nanotubes: Techniques, Applications, and Future.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2020Review
- Design and Fabrication of CMOS Microstructures to Locally Synthesize Carbon Nanotubes for Gas Sensing.Sensors (Basel, Switzerland) · 2019Article
- Carbon-Nanotube-Based Monolithic CMOS Platform for Electrochemical Detection of Neurotransmitter Glutamate.Sensors (Basel, Switzerland) · 2019Article
- Monolithic CMOS sensor platform featuring an array of 9'216 carbon-nanotube-sensor elements and low-noise, wide-bandwidth and wide-dynamic-range readout circuitry.Sensors and actuators. B, Chemical · 2019Article
Corrections and comments
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Authors and funding
5 authors.
Funding
Abstract
Carbon-nanotube (CNT)-based sensors offer the potential to detect single-molecule events and picomolar analyte concentrations. An important step toward applications of such nanosensors is their integration in large arrays. The availability of large arrays would enable multiplexed and parallel sensing, and the simultaneously obtained sensor signals would facilitate statistical analysis. A reliable method to fabricate an array of 1024 CNT-based sensors on a fully processed complementary-metal-oxide-semiconductor microsystem is presented. A high-yield process for the deposition of CNTs from a suspension by means of liquid-coupled floating-electrode dielectrophoresis (DEP), which yielded 80% of the sensor devices featuring between one and five CNTs, is developed. The mechanism of floating-electrode DEP on full arrays and individual devices to understand its self-limiting behavior is studied. The resistance distributions across the array of CNT devices with respect to different DEP parameters are characterized. The CNT devices are then operated as liquid-gated CNT field-effect-transistors (LG-CNTFET) in liquid environment. Current dependency to the gate voltage of up to two orders of magnitude is recorded. Finally, the sensors are validated by studying the pH dependency of the LG-CNTFET conductance and it is demonstrated that 73% of the CNT sensors of a given microsystem show a resistance decrease upon increasing the pH value.
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Registered trials
Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.