ArticleSensors (Basel, Switzerland)2017
Topologically Optimized Nano-Positioning Stage Integrating with a Capacitive Comb Sensor.
Article in Sensors (Basel, Switzerland), 2017. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
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Who cites it
2 citing papers in PubMed.
- High-Sensitivity Encoder-Like Micro Area-Changed Capacitive Transducer for a Nano-g Micro Accelerometer.Sensors (Basel, Switzerland) · 2017Article
- Piezoelectric Actuated Phase Shifter Based on External Laser Interferometer: Design, Control and Experimental Validation.Sensors (Basel, Switzerland) · 2017Article
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Authors and funding
6 authors.
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Abstract
Nano-positioning technology has been widely used in many fields, such as microelectronics, optical engineering, and micro manufacturing. This paper presents a one-dimensional (1D) nano-positioning system, adopting a piezoelectric ceramic (PZT) actuator and a multi-objective topological optimal structure. The combination of a nano-positioning stage and a feedback capacitive comb sensor has been achieved. In order to obtain better performance, a wedge-shaped structure is used to apply the precise pre-tension for the piezoelectric ceramics. Through finite element analysis and experimental verification, better static performance and smaller kinetic coupling are achieved. The output displacement of the system achieves a long-stroke of up to 14.7 μm and high-resolution of less than 3 nm. It provides a flexible and efficient way in the design and optimization of the nano-positioning system.
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