ArticleNanoscale research letters2016
Performance of Nano-Submicron-Stripe Pd Thin-Film Temperature Sensors.
Article in Nanoscale research letters, 2016. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 7 papers.
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Who cites it
7 citing papers in PubMed.
- Article
- Thermal Probing Techniques for a Single Live Cell.Sensors (Basel, Switzerland) · 2022Review
- Sensors-on-paper: Fabrication of graphite thermal sensor arrays on cellulose paper for large area temperature mapping.HardwareX · 2022Article
- Geometric Nonlinear Model for Prediction of Frequency-Temperature Behavior of SAW Devices for Nanosensor Applications.Sensors (Basel, Switzerland) · 2020Article
- Thermal sensing in fluid at the micro-nano-scales.Biomicrofluidics · 2018Review
- Facile Fabrication of Multi-hierarchical Porous Polyaniline Composite as Pressure Sensor and Gas Sensor with Adjustable Sensitivity.Nanoscale research letters · 2017Article
- Measurement of local temperature increments induced by cultured HepG2 cells with micro-thermocouples in a thermally stabilized system.Scientific reports · 2017Article
Corrections and comments
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Authors and funding
5 authors.
Funding
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Abstract
Dozens of small dual-beam thin-film temperature sensors with a total width down to 430 nm were fabricated and tested. The sensors were all made from 90-nm-thick Pd thin films, where the width of the narrow stripes was 70-100 nm and that of the wide ones was 210-800 nm. Two different calibration methods showed consistent and repeatable sensitivities of 0.7-1.2 μV/K for the sensors, confirming that the sensitivity mainly depended on the width configuration of each sensor. By integrating arrays of such sensors on a practical testing platform using hybrid e-beam lithography and photolithography techniques, we demonstrated that these sensors were capable of detecting a weak surface temperature difference of 0.1-0.2 K at microscale, and they could be scaled up as built-in temperature sensors in many practical devices.
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Registered trials
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