ArticleSensors (Basel, Switzerland)2016
Helium Ion Microscope-Assisted Nanomachining of Resonant Nanostrings.
Article in Sensors (Basel, Switzerland), 2016. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 2 papers.
What it found
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The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.
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Who cites it
2 citing papers in PubMed.
- A review of defect engineering, ion implantation, and nanofabrication using the helium ion microscope.Beilstein journal of nanotechnology · 2021Review
- An Experiment-Based Profile Function for the Calculation of Damage Distribution in Bulk Silicon Induced by a Helium Focused Ion Beam Process.Sensors (Basel, Switzerland) · 2020Article
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Authors and funding
4 authors.
Funding
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Abstract
Helium ion microscopy has recently emerged as a potent tool for the in-situ modification and imaging of nanoscale devices. For example; finely focused helium ion beams have been used for the milling of pores in suspended structures. We here report the use of helium ion milling for the post-fabrication modification of nanostrings machined from an amorphous SiCN material. The modification consisted of milling linear arrays of holes along the length of nanostrings. This milling results in a slight decrease of resonant frequency while increasing the surface to volume ratio of the device. The frequency decrease is attributed to a reduction of the effective Young's modulus of the string, which in turn reduces the tension the string is under. Such experimental observations are supported by the finite element analysis of milled and non-milled strings.
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Registered trials
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