Evidence map›Paper›PMID 27042384›Full record

ArticleJournal of surface engineered materials and advanced technology2015

Electrodeposition of Gold to Conformally Fill High Aspect Ratio Nanometric Silicon Grating Trenches: A Comparison of Pulsed and Direct Current Protocols.

Sami A Znati, Nicholas Chedid, Houxun Miao, Lei Chen, Eric E Bennett, Han Wen

Abstract read
PubMed Full text at PMC Publisher
In one paragraph

Article in Journal of surface engineered materials and advanced technology, 2015. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 3 papers.

0numbers the graph read from it
0cells of the map it votes in
3citing papers in PubMed
–field-weighted citation impact
1 · What the graph read from it

What it found

Each row is one number read from the abstract, on the scale the paper reported it, with its interval. Left of the dashed line favours the treatment, right favours the comparator. Under each row is the sentence it came from. New to these charts? A ten-minute tutorial.

The abstract states no effect estimate the extractor could read, or names no intervention and outcome on the map, so this paper lights no cell and moves no belief. It is still indexed, cited and linked below.

2 · The registry

The trial behind it

Trials whose registry record cites this paper, or whose number appears in the abstract. A trial that started after this paper was published is citing it as background, not reporting it.

Neither the registry nor the abstract names a trial number. If this is a trial report, that itself is worth knowing.

3 · Its place in the literature

Who cites it

3 citing papers in PubMed.

  1. Article
  2. Review
  3. Article
4 · The record

Corrections and comments

PubMed lists nothing against this paper. Absence here is not a guarantee, only a check that was made.

5 · Who and what money

Authors and funding

6 authors.

Sami A ZnatiImaging Physics Laboratory, Biochemistry and Biophysics Center, National Heart, Lung and Blood Institute, National Institutes of Health, Bethesda, MD 20892.
Nicholas ChedidImaging Physics Laboratory, Biochemistry and Biophysics Center, National Heart, Lung and Blood Institute, National Institutes of Health, Bethesda, MD 20892.
Houxun MiaoImaging Physics Laboratory, Biochemistry and Biophysics Center, National Heart, Lung and Blood Institute, National Institutes of Health, Bethesda, MD 20892.
Lei ChenCenter for Nanoscale Science and Technology, National Institute of Standards and Technology, Gaithersburg, MD 20899.
Eric E BennettImaging Physics Laboratory, Biochemistry and Biophysics Center, National Heart, Lung and Blood Institute, National Institutes of Health, Bethesda, MD 20892.
Han WenImaging Physics Laboratory, Biochemistry and Biophysics Center, National Heart, Lung and Blood Institute, National Institutes of Health, Bethesda, MD 20892.

Funding

Technical development of x-ray phase contrast imagingZIAHL006171 · NHLBI · NATIONAL HEART, LUNG, AND BLOOD INSTITUTE · PI WEN, HAN · 2013 to 2019
$4.3M
Intramural NIST DOC 9999-NIST
6 · The paper itself

Abstract

Filling high-aspect-ratio trenches with gold is a frequent requirement in the fabrication of x-ray optics as well as micro-electronic components and other fabrication processes. Conformal electrodeposition of gold in sub-micron-width silicon trenches with an aspect ratio greater than 35 over a grating area of several square centimeters is challenging and has not been described in the literature previously. A comparison of pulsed plating and constant current plating led to a gold electroplating protocol that reliably filled trenches for such structures.

Indexed as

ALD adhesive layeratomic layer depositiondirect current electrodepositiongold electrodepostiongold electroplatinggrating fillinghigh aspect ratio trenchesplatinum seedlayerPulsed Electroplatingpulsed vs. direct current electroplatingsilicon trench gratingstrench filling

Identifiers

PMID27042384
PMCPMC4812826

What OpenQuestion holds

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LicenceCC BY
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Registered trials

None linked

Read under generation 80e0d062 · epoch 390. Bibliography from PubMed, PubMed Central and OpenAlex; grants from NIH RePORTER; trial links from ClinicalTrials.gov; estimates, votes and beliefs from the OpenQuestion graph.