ArticleScientific reports2016
Laser Scanning Holographic Lithography for Flexible 3D Fabrication of Multi-Scale Integrated Nano-structures and Optical Biosensors.
Article in Scientific reports, 2016. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 12 papers.
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Who cites it
12 citing papers in PubMed.
- Large-Area Flexible Photopolymerized Scaffolds: Fabrication and Application to Cardiomyocytes.ACS applied materials & interfaces · 2026Article
- Nanomechanical and Optical Properties of Anti-Counterfeiting Nanostructures Obtained by Hydrogel Photoresist in Laser Processing.Biomimetics (Basel, Switzerland) · 2025Article
- Atomic Layer Assembly Based on Sacrificial Templates for 3D Nanofabrication.Micromachines · 2022Review
- Femtosecond Laser Fabrication of Micro and Nano-Structures on CIGS/ITO Bilayer Films for Thin-Film Solar Cells.Materials (Basel, Switzerland) · 2021Article
- Nanophotonic color splitters for high-efficiency imaging.iScience · 2021Article
- Photonics in nature and bioinspired designs: sustainable approaches for a colourful world.Nanoscale advances · 2020Review
- Rapid Fabrication of Continuous Surface Fresnel Microlens Array by Femtosecond Laser Focal Field Engineering.Micromachines · 2020Article
- Fast Acoustic Light Sculpting for On-Demand Maskless Lithography.Advanced science (Weinheim, Baden-Wurttemberg, Germany) · 2019Article
- Article
- Engineering of Hybrid Nanoporous Anodic Alumina Photonic Crystals by Heterogeneous Pulse Anodization.Scientific reports · 2018Article
- Fabrication of Nanoshell-Based 3D Periodic Structures by Templating Process using Solution-derived ZnO.Nanoscale research letters · 2017Article
- PdCo/Pd-Hexacyanocobaltate Hybrid Nanoflowers: Cyanogel-Bridged One-Pot Synthesis and Their Enhanced Catalytic Performance.Scientific reports · 2016Article
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Authors and funding
2 authors.
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Abstract
Three-dimensional (3D) periodic nanostructures underpin a promising research direction on the frontiers of nanoscience and technology to generate advanced materials for exploiting novel photonic crystal (PC) and nanofluidic functionalities. However, formation of uniform and defect-free 3D periodic structures over large areas that can further integrate into multifunctional devices has remained a major challenge. Here, we introduce a laser scanning holographic method for 3D exposure in thick photoresist that combines the unique advantages of large area 3D holographic interference lithography (HIL) with the flexible patterning of laser direct writing to form both micro- and nano-structures in a single exposure step. Phase mask interference patterns accumulated over multiple overlapping scans are shown to stitch seamlessly and form uniform 3D nanostructure with beam size scaled to small 200 μm diameter. In this way, laser scanning is presented as a facile means to embed 3D PC structure within microfluidic channels for integration into an optofluidic lab-on-chip, demonstrating a new laser HIL writing approach for creating multi-scale integrated microsystems.
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