ArticleScientific reports2015
Fabrication of 3-nm-thick Si3N4 membranes for solid-state nanopores using the poly-Si sacrificial layer process.
Article in Scientific reports, 2015. The graph could read no effect estimate from its abstract, so it casts no vote on the map. Cited by 16 papers.
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Who cites it
16 citing papers in PubMed.
- Graphene Nanopore Fabrication and Applications.International journal of molecular sciences · 2025Review
- In situ generation of (sub) nanometer pores in MoSNature communications · 2024Article
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- Study on the controllability of the fabrication of single-crystal silicon nanopores/nanoslits with a fast-stop ionic current-monitored TSWE method.Microsystems & nanoengineering · 2023Article
- Localized Nanopore Fabrication via Controlled Breakdown.Nanomaterials (Basel, Switzerland) · 2022Review
- Recent advances in biological nanopores for nanopore sequencing, sensing and comparison of functional variations in MspA mutants.RSC advances · 2021Review
- Application of Solid-State Nanopore in Protein Detection.International journal of molecular sciences · 2020Review
- Controlling DNA Translocation Through Solid-state Nanopores.Nanoscale research letters · 2020Review
- Solid-state nanopores towards single-molecule DNA sequencing.Journal of human genetics · 2020Review
- A novel shaped-controlled fabrication of nanopore and its applications in quantum electronics.Scientific reports · 2019Article
- Stable fabrication of a large nanopore by controlled dielectric breakdown in a high-pH solution for the detection of various-sized molecules.Scientific reports · 2019Article
- Fabrication and practical applications of molybdenum disulfide nanopores.Nature protocols · 2019Article
- Two-step breakdown of a SiN membrane for nanopore fabrication: Formation of thin portion and penetration.Scientific reports · 2018Article
- Mechanically stable solvent-free lipid bilayers in nano- and micro-tapered apertures for reconstitution of cell-free synthesized hERG channels.Scientific reports · 2017Article
- Article
- Nanopore Detection of Cancer Biomarkers: A Challenge to Science.Technology in cancer research & treatmentArticle
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Authors and funding
4 authors.
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Abstract
To improve the spatial resolution of solid-state nanopores, thinning the membrane is a very important issue. The most commonly used membrane material for solid-state nanopores is silicon nitride (Si3N4). However, until now, stable wafer-scale fabrication of Si3N4 membranes with a thickness of less than 5 nm has not been reported, although a further reduction in thickness is desired to improve spatial resolution. In the present study, to fabricate thinner Si3N4 membranes with a thickness of less than 5 nm in a wafer, a new fabrication process that employs a polycrystalline-Si (poly-Si) sacrificial layer was developed. This process enables the stable fabrication of Si3N4 membranes with thicknesses of 3 nm. Nanopores were fabricated in the membrane using a transmission electron microscope (TEM) beam. Based on the relationship between the ionic current through the nanopores and their diameter, the effective thickness of the nanopores was estimated to range from 0.6 to 2.2 nm. Moreover, DNA translocation through the nanopores was observed.
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